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- W1519271307 abstract "TaB 2 compound formation in TaSi 2 is demonstrated by means of SEM, SIMS-and XRD analysis. This holds for B-doping of TaSi 2 by means of diffusion from poly-Si as well as for direct implantation. The formation of TaAs could not yet be proven. As the mobile boron concentration level in TaSi 2 is low due to the compound formation diffusion from TaSi 2 into Si is rather limited." @default.
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- W1519271307 date "1988-09-01" @default.
- W1519271307 modified "2023-09-24" @default.
- W1519271307 title "Effects of Compound Formation with Dopants in TaSi 2" @default.
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