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- W1519765325 abstract "In this paper the thermal transport phenomena in MEMS are investigated. The thermal Klein-Gordon transport equation for nanoscale structures is formulated and solved. Key words: MEMS, Klein-Gordon equation, Casimir effect." @default.
- W1519765325 created "2016-06-24" @default.
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- W1519765325 date "2005-06-09" @default.
- W1519765325 modified "2023-10-17" @default.
- W1519765325 title "On the Casimir effect in the microelectromechanical systems MEMS" @default.
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- W1519765325 hasPublicationYear "2005" @default.
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