FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1519906821> ?p ?o ?g. }

• W1519906821 abstract "Integrated 10 /spl mu/m thick poly-SiGe gyroscopes are processed on top of an 8 standard 0.35 /spl mu/m CMOS wafer with 5 metal levels by using an advanced plasma-enhanced chemical vapor deposition multi-layer technology. The gyroscopes are free-moving with Q-factors for the drive mode up to 10000 at the pressure of 0.8 mTorr while the CMOS chip is fully functional." @default.
• W1519906821 created "2016-06-24" @default.
• W1519906821 creator A5000917935 @default.
• W1519906821 creator A5003738979 @default.
• W1519906821 creator A5006353399 @default.
• W1519906821 creator A5011315658 @default.
• W1519906821 creator A5024409667 @default.
• W1519906821 creator A5027292208 @default.
• W1519906821 creator A5045143478 @default.
• W1519906821 creator A5049440936 @default.
• W1519906821 creator A5056826672 @default.
• W1519906821 creator A5063719753 @default.
• W1519906821 creator A5068306380 @default.
• W1519906821 creator A5075522603 @default.
• W1519906821 creator A5080800663 @default.
• W1519906821 creator A5082817200 @default.
• W1519906821 creator A5084210926 @default.
• W1519906821 creator A5088173244 @default.
• W1519906821 date "2005-08-30" @default.
• W1519906821 modified "2023-10-02" @default.
• W1519906821 title "Processing of MEMS gyroscopes on top of CMOS ICs" @default.
• W1519906821 cites W1516008183 @default.
• W1519906821 cites W1699586357 @default.
• W1519906821 cites W1981574050 @default.
• W1519906821 cites W1989573446 @default.
• W1519906821 cites W2029028817 @default.
• W1519906821 cites W2060603102 @default.
• W1519906821 cites W2082838562 @default.
• W1519906821 cites W2153959273 @default.
• W1519906821 cites W2169856829 @default.
• W1519906821 doi "https://doi.org/10.1109/isscc.2005.1493882" @default.
• W1519906821 hasPublicationYear "2005" @default.
• W1519906821 type Work @default.
• W1519906821 sameAs 1519906821 @default.
• W1519906821 citedByCount "23" @default.
• W1519906821 countsByYear W15199068212012 @default.
• W1519906821 countsByYear W15199068212013 @default.
• W1519906821 countsByYear W15199068212019 @default.
• W1519906821 crossrefType "proceedings-article" @default.
• W1519906821 hasAuthorship W1519906821A5000917935 @default.
• W1519906821 hasAuthorship W1519906821A5003738979 @default.
• W1519906821 hasAuthorship W1519906821A5006353399 @default.
• W1519906821 hasAuthorship W1519906821A5011315658 @default.
• W1519906821 hasAuthorship W1519906821A5024409667 @default.
• W1519906821 hasAuthorship W1519906821A5027292208 @default.
• W1519906821 hasAuthorship W1519906821A5045143478 @default.
• W1519906821 hasAuthorship W1519906821A5049440936 @default.
• W1519906821 hasAuthorship W1519906821A5056826672 @default.
• W1519906821 hasAuthorship W1519906821A5063719753 @default.
• W1519906821 hasAuthorship W1519906821A5068306380 @default.
• W1519906821 hasAuthorship W1519906821A5075522603 @default.
• W1519906821 hasAuthorship W1519906821A5080800663 @default.
• W1519906821 hasAuthorship W1519906821A5082817200 @default.
• W1519906821 hasAuthorship W1519906821A5084210926 @default.
• W1519906821 hasAuthorship W1519906821A5088173244 @default.
• W1519906821 hasConcept C119599485 @default.
• W1519906821 hasConcept C127413603 @default.
• W1519906821 hasConcept C146978453 @default.
• W1519906821 hasConcept C158488048 @default.
• W1519906821 hasConcept C160671074 @default.
• W1519906821 hasConcept C165005293 @default.
• W1519906821 hasConcept C192562407 @default.
• W1519906821 hasConcept C24326235 @default.
• W1519906821 hasConcept C37977207 @default.
• W1519906821 hasConcept C46362747 @default.
• W1519906821 hasConcept C49040817 @default.
• W1519906821 hasConceptScore W1519906821C119599485 @default.
• W1519906821 hasConceptScore W1519906821C127413603 @default.
• W1519906821 hasConceptScore W1519906821C146978453 @default.
• W1519906821 hasConceptScore W1519906821C158488048 @default.
• W1519906821 hasConceptScore W1519906821C160671074 @default.
• W1519906821 hasConceptScore W1519906821C165005293 @default.
• W1519906821 hasConceptScore W1519906821C192562407 @default.
• W1519906821 hasConceptScore W1519906821C24326235 @default.
• W1519906821 hasConceptScore W1519906821C37977207 @default.
• W1519906821 hasConceptScore W1519906821C46362747 @default.
• W1519906821 hasConceptScore W1519906821C49040817 @default.
• W1519906821 hasLocation W15199068211 @default.
• W1519906821 hasOpenAccess W1519906821 @default.
• W1519906821 hasPrimaryLocation W15199068211 @default.
• W1519906821 hasRelatedWork W1541889758 @default.
• W1519906821 hasRelatedWork W1693738544 @default.
• W1519906821 hasRelatedWork W1972539125 @default.
• W1519906821 hasRelatedWork W2012317515 @default.
• W1519906821 hasRelatedWork W2053839707 @default.
• W1519906821 hasRelatedWork W2056289049 @default.
• W1519906821 hasRelatedWork W2107367107 @default.
• W1519906821 hasRelatedWork W2115184013 @default.
• W1519906821 hasRelatedWork W2130265278 @default.
• W1519906821 hasRelatedWork W2153959273 @default.
• W1519906821 hasRelatedWork W2169856829 @default.
• W1519906821 hasRelatedWork W2244801784 @default.
• W1519906821 hasRelatedWork W2249759886 @default.
• W1519906821 hasRelatedWork W2542857106 @default.
• W1519906821 hasRelatedWork W3145913852 @default.
• W1519906821 hasRelatedWork W1844572188 @default.
• W1519906821 hasRelatedWork W2830572489 @default.
• W1519906821 hasRelatedWork W2969005606 @default.
• W1519906821 hasRelatedWork W3094713753 @default.
• W1519906821 hasRelatedWork W3097369274 @default.

• next