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- W1520072462 abstract "We have used Si/sub 0.3/Ge/sub 0.7/ to improve the hole mobility of La/sub 2/O/sub 3/ p-MOSFETs. A hole mobility of 55 cm/sup 2//V-s in nitrided La/sub 2/O/sub 3//Si/sub 0.3/Ge/sub 0.7/ p-MOSFET is measured and 1.8 times higher than the 31 cm/sup 2//V-s mobility in nitrided La/sub 2/O/sub 3//Si control p-MOSFET. The Ni germano-silicide shows a low sheet resistance of 4-6 /spl Omega///spl square/ and small junction leakage currents of 3/spl times/10/sup -8/ A/cm/sup 2/ and 2/spl times/10/sup -7/ A/cm/sup 2/ for respective P/sup +/N and N/sup +/P junctions." @default.
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- W1520072462 date "2004-05-06" @default.
- W1520072462 modified "2023-09-25" @default.
- W1520072462 title "La/sub 2/O/sub 3//Si/sub 0.3/Ge/sub 0.7/ p-MOSFETs and Ni germano-silicide" @default.
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- W1520072462 doi "https://doi.org/10.1109/vtsa.2003.1252550" @default.
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