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- W1520332432 abstract "We present results on the stability and tailoring of the cell size of conducting δ-TixTa1−xN obtained by film growth and ab initio calculations. Despite the limited solubility of Ta in Ti, we show that TiN and TaN are soluble due to the hybrization of the d and sp electrons of the metal and N, respectively, that stabilizes the ternary system to the rocksalt structure. The stress-free cell sizes follow the Vegard’s rule; nevertheless, process-dependent stresses expand the cell size of the as-grown films. The electronic properties of δ-TixTa1−xN films (ρ=180Ωcm) are similar to those of TiN and TaN." @default.
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- W1520332432 date "2008-07-07" @default.
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- W1520332432 title "Conducting transition metal nitride thin films with tailored cell sizes: The case of δ-TixTa1−xN" @default.
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- W1520332432 doi "https://doi.org/10.1063/1.2955838" @default.
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