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- W1520512698 abstract "Fatigue life for the moving part had been inspected at the real operation condition for the first time. The obtained fracture rate was about 0.3 indicated the MEMS devices were reliable enough for practical usage." @default.
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- W1520512698 date "2004-02-22" @default.
- W1520512698 modified "2023-09-27" @default.
- W1520512698 title "Fatigue characteristics of Si movable comb inserted into MEMS optical devices" @default.
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