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- W1520526630 abstract "Summary form only given. Interdigitated metal-semiconductor-metal (MSM) Schottky diode photodetectors based on silicon-on-insulator substrates (SOI) are attractive due to their high speed achievable at long wavelengths. In this work, MSM-PDs have been fabricated on SOI substrates using electron-beam lithography and lift-off techniques. DC and transient characterization of the SOI-MSM-PDs show low detector dark current, low depletion capacitance, high speed and reasonable photoresponse. Two different photodetectors were investigated: MSM1 with finger width and spacing of 200 nm, an active area of 9.5/spl times/18 /spl mu/m/sup 2/ and a top p-type Si-layer thickness of 0.5 /spl mu/m, and MSM2 with finger width and spacing of 70/400 nm, an active area of 9.5/spl times/29.5 /spl mu/m2 and a top n-type Si-layer thickness of 4 /spl mu/m. In order to achieve the Schottky contact, MSM1 was metallized with Ti-Au (20/30 nm), while MSM2 was metallized with Al (30 nm)." @default.
- W1520526630 created "2016-06-24" @default.
- W1520526630 creator A5040377776 @default.
- W1520526630 creator A5050128749 @default.
- W1520526630 creator A5091242864 @default.
- W1520526630 date "2002-11-27" @default.
- W1520526630 modified "2023-09-26" @default.
- W1520526630 title "Nanoscale metal-semiconductor-metal photodetectors fabricated on SOI-substrates" @default.
- W1520526630 cites W1966011375 @default.
- W1520526630 cites W1991188049 @default.
- W1520526630 cites W2009847042 @default.
- W1520526630 cites W2051471146 @default.
- W1520526630 doi "https://doi.org/10.1109/soi.1998.723119" @default.
- W1520526630 hasPublicationYear "2002" @default.
- W1520526630 type Work @default.
- W1520526630 sameAs 1520526630 @default.
- W1520526630 citedByCount "2" @default.
- W1520526630 countsByYear W15205266302015 @default.
- W1520526630 countsByYear W15205266302021 @default.
- W1520526630 crossrefType "proceedings-article" @default.
- W1520526630 hasAuthorship W1520526630A5040377776 @default.
- W1520526630 hasAuthorship W1520526630A5050128749 @default.
- W1520526630 hasAuthorship W1520526630A5091242864 @default.
- W1520526630 hasConcept C108225325 @default.
- W1520526630 hasConcept C147789679 @default.
- W1520526630 hasConcept C16115445 @default.
- W1520526630 hasConcept C171250308 @default.
- W1520526630 hasConcept C17525397 @default.
- W1520526630 hasConcept C180651308 @default.
- W1520526630 hasConcept C185592680 @default.
- W1520526630 hasConcept C192562407 @default.
- W1520526630 hasConcept C200274948 @default.
- W1520526630 hasConcept C205200001 @default.
- W1520526630 hasConcept C23125352 @default.
- W1520526630 hasConcept C2779227376 @default.
- W1520526630 hasConcept C30066665 @default.
- W1520526630 hasConcept C49040817 @default.
- W1520526630 hasConcept C53143962 @default.
- W1520526630 hasConcept C53524968 @default.
- W1520526630 hasConcept C544956773 @default.
- W1520526630 hasConcept C78434282 @default.
- W1520526630 hasConceptScore W1520526630C108225325 @default.
- W1520526630 hasConceptScore W1520526630C147789679 @default.
- W1520526630 hasConceptScore W1520526630C16115445 @default.
- W1520526630 hasConceptScore W1520526630C171250308 @default.
- W1520526630 hasConceptScore W1520526630C17525397 @default.
- W1520526630 hasConceptScore W1520526630C180651308 @default.
- W1520526630 hasConceptScore W1520526630C185592680 @default.
- W1520526630 hasConceptScore W1520526630C192562407 @default.
- W1520526630 hasConceptScore W1520526630C200274948 @default.
- W1520526630 hasConceptScore W1520526630C205200001 @default.
- W1520526630 hasConceptScore W1520526630C23125352 @default.
- W1520526630 hasConceptScore W1520526630C2779227376 @default.
- W1520526630 hasConceptScore W1520526630C30066665 @default.
- W1520526630 hasConceptScore W1520526630C49040817 @default.
- W1520526630 hasConceptScore W1520526630C53143962 @default.
- W1520526630 hasConceptScore W1520526630C53524968 @default.
- W1520526630 hasConceptScore W1520526630C544956773 @default.
- W1520526630 hasConceptScore W1520526630C78434282 @default.
- W1520526630 hasLocation W15205266301 @default.
- W1520526630 hasOpenAccess W1520526630 @default.
- W1520526630 hasPrimaryLocation W15205266301 @default.
- W1520526630 hasRelatedWork W1581295559 @default.
- W1520526630 hasRelatedWork W1819637585 @default.
- W1520526630 hasRelatedWork W1966846689 @default.
- W1520526630 hasRelatedWork W1970112512 @default.
- W1520526630 hasRelatedWork W2016024229 @default.
- W1520526630 hasRelatedWork W2042753245 @default.
- W1520526630 hasRelatedWork W2073428673 @default.
- W1520526630 hasRelatedWork W2099357937 @default.
- W1520526630 hasRelatedWork W2099616194 @default.
- W1520526630 hasRelatedWork W2103863177 @default.
- W1520526630 hasRelatedWork W2109591065 @default.
- W1520526630 hasRelatedWork W2116907848 @default.
- W1520526630 hasRelatedWork W2119366035 @default.
- W1520526630 hasRelatedWork W2126782857 @default.
- W1520526630 hasRelatedWork W2137810906 @default.
- W1520526630 hasRelatedWork W2163003609 @default.
- W1520526630 hasRelatedWork W2163745277 @default.
- W1520526630 hasRelatedWork W2168504990 @default.
- W1520526630 hasRelatedWork W2354768650 @default.
- W1520526630 hasRelatedWork W2564399623 @default.
- W1520526630 isParatext "false" @default.
- W1520526630 isRetracted "false" @default.
- W1520526630 magId "1520526630" @default.
- W1520526630 workType "article" @default.