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- W1520945093 abstract "Processes that use energetic ions for large substrates require that the time-averaged erosion effects from the ion flux be uniform across the surface. A numerical model has been developed to determine this flux and its effects on surface etching of a silica/photoresist combination. The geometry of the source and substrate is very similar to a typical deposition geometry with single or planetary substrate rotation. The model was used to tune an inert ion-etching process that used single or multiple Kaufman sources to less than 3% uniformity over a 30-cm aperture after etching 8 {micro}m of material. The same model can be used to predict uniformity for ion-assisted deposition (IAD)." @default.
- W1520945093 created "2016-06-24" @default.
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- W1520945093 date "1998-12-01" @default.
- W1520945093 modified "2023-09-23" @default.
- W1520945093 title "Uniformity model for energetic ion processes using a Kaufman ion source" @default.
- W1520945093 doi "https://doi.org/10.2172/677197" @default.
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