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- W152097559 abstract "Cathodoluminescence provides an analytical tool for studying thin films and bulk silicon dioxide. The major problems with the technique are the difficulty in obtaining quantitative data and the fact that few of the luminescence bands have been firmly identified. This paper discusses some of the problems involved and presents data on doping and processing effects on both bulk and MOS thin film SiO 2. Sodium doping has been found to increase the luminescence band at 625 nm but not to affect the 290 nm band tentatively associated with the oxygen vacancy.(1) The 290 nm band is increased in HC1 growth of SiO 2 films. Impurity doping has shown bands at 435 nm and 510 nm associated with Ge in crystalline quartz, Cu in thin films gives bands at 425 nm and 525 nm, and Au in thin films gives bands at 365 nm and 520 nm. Defect profiles can be estimated by varying the excitation beam voltage. Reduction in CO increases the 290 nm bands front surface concentration. Both the 290 nm band and the 450 nm band show peaked concentrations at the Si-SiO 2 interface." @default.
- W152097559 created "2016-06-24" @default.
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- W152097559 date "1978-01-01" @default.
- W152097559 modified "2023-09-26" @default.
- W152097559 title "CATHODOLUMINESCENCE STUDIES OF SiO2- Na,Cl,Ge,Cu,Au AND OXYGEN VACANCY RESULTS" @default.
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- W152097559 doi "https://doi.org/10.1016/b978-0-08-023049-8.50053-1" @default.
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