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- W1520985155 endingPage "576" @default.
- W1520985155 startingPage "574" @default.
- W1520985155 abstract "Amorphous hydrogenated silicon films with a hydrogen content of about 1022 cm-3 were deposited in a capacitively coupled radial flow reactor from silane-triethylboron mixtures. Film composition and optical properties were investigated." @default.
- W1520985155 created "2016-06-24" @default.
- W1520985155 creator A5017904017 @default.
- W1520985155 creator A5019845731 @default.
- W1520985155 creator A5033405215 @default.
- W1520985155 date "1991-04-01" @default.
- W1520985155 modified "2023-10-18" @default.
- W1520985155 title "Boron doped a-SiCx:H films from B(C2H5)3SiH4" @default.
- W1520985155 cites W183602754 @default.
- W1520985155 cites W1972055775 @default.
- W1520985155 cites W1981688727 @default.
- W1520985155 cites W2011499097 @default.
- W1520985155 cites W2022295483 @default.
- W1520985155 cites W2044053786 @default.
- W1520985155 cites W2058272142 @default.
- W1520985155 cites W2091781784 @default.
- W1520985155 doi "https://doi.org/10.1016/0921-4526(91)90181-d" @default.
- W1520985155 hasPublicationYear "1991" @default.
- W1520985155 type Work @default.
- W1520985155 sameAs 1520985155 @default.
- W1520985155 citedByCount "5" @default.
- W1520985155 crossrefType "journal-article" @default.
- W1520985155 hasAuthorship W1520985155A5017904017 @default.
- W1520985155 hasAuthorship W1520985155A5019845731 @default.
- W1520985155 hasAuthorship W1520985155A5033405215 @default.
- W1520985155 hasConcept C113196181 @default.
- W1520985155 hasConcept C127413603 @default.
- W1520985155 hasConcept C159985019 @default.
- W1520985155 hasConcept C178790620 @default.
- W1520985155 hasConcept C185592680 @default.
- W1520985155 hasConcept C192562407 @default.
- W1520985155 hasConcept C2776390347 @default.
- W1520985155 hasConcept C2778024649 @default.
- W1520985155 hasConcept C2779667780 @default.
- W1520985155 hasConcept C42360764 @default.
- W1520985155 hasConcept C43617362 @default.
- W1520985155 hasConcept C49040817 @default.
- W1520985155 hasConcept C501308230 @default.
- W1520985155 hasConcept C512968161 @default.
- W1520985155 hasConcept C544956773 @default.
- W1520985155 hasConcept C56052488 @default.
- W1520985155 hasConcept C57863236 @default.
- W1520985155 hasConcept C8010536 @default.
- W1520985155 hasConceptScore W1520985155C113196181 @default.
- W1520985155 hasConceptScore W1520985155C127413603 @default.
- W1520985155 hasConceptScore W1520985155C159985019 @default.
- W1520985155 hasConceptScore W1520985155C178790620 @default.
- W1520985155 hasConceptScore W1520985155C185592680 @default.
- W1520985155 hasConceptScore W1520985155C192562407 @default.
- W1520985155 hasConceptScore W1520985155C2776390347 @default.
- W1520985155 hasConceptScore W1520985155C2778024649 @default.
- W1520985155 hasConceptScore W1520985155C2779667780 @default.
- W1520985155 hasConceptScore W1520985155C42360764 @default.
- W1520985155 hasConceptScore W1520985155C43617362 @default.
- W1520985155 hasConceptScore W1520985155C49040817 @default.
- W1520985155 hasConceptScore W1520985155C501308230 @default.
- W1520985155 hasConceptScore W1520985155C512968161 @default.
- W1520985155 hasConceptScore W1520985155C544956773 @default.
- W1520985155 hasConceptScore W1520985155C56052488 @default.
- W1520985155 hasConceptScore W1520985155C57863236 @default.
- W1520985155 hasConceptScore W1520985155C8010536 @default.
- W1520985155 hasIssue "1-4" @default.
- W1520985155 hasLocation W15209851551 @default.
- W1520985155 hasOpenAccess W1520985155 @default.
- W1520985155 hasPrimaryLocation W15209851551 @default.
- W1520985155 hasRelatedWork W2014486340 @default.
- W1520985155 hasRelatedWork W2015265961 @default.
- W1520985155 hasRelatedWork W2019985495 @default.
- W1520985155 hasRelatedWork W2026600810 @default.
- W1520985155 hasRelatedWork W2027304866 @default.
- W1520985155 hasRelatedWork W2033669323 @default.
- W1520985155 hasRelatedWork W2074953504 @default.
- W1520985155 hasRelatedWork W2083321254 @default.
- W1520985155 hasRelatedWork W2092524599 @default.
- W1520985155 hasRelatedWork W2098052754 @default.
- W1520985155 hasVolume "170" @default.
- W1520985155 isParatext "false" @default.
- W1520985155 isRetracted "false" @default.
- W1520985155 magId "1520985155" @default.
- W1520985155 workType "article" @default.