Matches in SemOpenAlex for { <https://semopenalex.org/work/W1521198807> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W1521198807 abstract "Lifetime prediction and reliability evaluation of micro-electro-mechanical systems (MEMS) are influenced by permanent deformations caused by plastic strain induced by creep. Creep in microstructures becomes critical in those applications where permanent loads persist for long times and thermal heating induces temperature increasing respect to the ambient. Main goal of this paper is to investigate the creep mechanism in RF-MEMS microstructures by means of experiments. This is done firstly through the detection of permanent deformation of specimens and, then, by measuring the variation of electro-mechanical parameters (resonance frequency, pull-in voltage) that provide indirect evaluation of mechanical stiffness alteration from creep. To prevent the errors caused be cumulative heating of samples and dimensional tolerances, three specimens with the same nominal geometry have been tested per each combination of actuation voltage and temperature. Results demonstrated the presence of plastic deformation due to creep, combined with a component of reversible strain linked to the viscoelastic behavior of the material." @default.
- W1521198807 created "2016-06-24" @default.
- W1521198807 creator A5050846547 @default.
- W1521198807 creator A5060169443 @default.
- W1521198807 creator A5090287657 @default.
- W1521198807 date "2015-05-21" @default.
- W1521198807 modified "2023-09-23" @default.
- W1521198807 title "Experimental investigations of creep in gold RF-MEMS microstructures" @default.
- W1521198807 cites W112677553 @default.
- W1521198807 cites W1974136193 @default.
- W1521198807 cites W1991471325 @default.
- W1521198807 cites W2025142980 @default.
- W1521198807 cites W2048905918 @default.
- W1521198807 cites W2049975172 @default.
- W1521198807 cites W2051680608 @default.
- W1521198807 cites W2057108654 @default.
- W1521198807 cites W2060465733 @default.
- W1521198807 cites W2064309428 @default.
- W1521198807 cites W2082669478 @default.
- W1521198807 cites W2086458824 @default.
- W1521198807 cites W2100088116 @default.
- W1521198807 cites W2119151825 @default.
- W1521198807 cites W2151074881 @default.
- W1521198807 cites W2158015055 @default.
- W1521198807 cites W2160959262 @default.
- W1521198807 cites W2171777899 @default.
- W1521198807 doi "https://doi.org/10.1117/12.2181071" @default.
- W1521198807 hasPublicationYear "2015" @default.
- W1521198807 type Work @default.
- W1521198807 sameAs 1521198807 @default.
- W1521198807 citedByCount "0" @default.
- W1521198807 crossrefType "proceedings-article" @default.
- W1521198807 hasAuthorship W1521198807A5050846547 @default.
- W1521198807 hasAuthorship W1521198807A5060169443 @default.
- W1521198807 hasAuthorship W1521198807A5090287657 @default.
- W1521198807 hasConcept C119599485 @default.
- W1521198807 hasConcept C121332964 @default.
- W1521198807 hasConcept C127413603 @default.
- W1521198807 hasConcept C149912024 @default.
- W1521198807 hasConcept C159985019 @default.
- W1521198807 hasConcept C165801399 @default.
- W1521198807 hasConcept C186541917 @default.
- W1521198807 hasConcept C192562407 @default.
- W1521198807 hasConcept C204366326 @default.
- W1521198807 hasConcept C204530211 @default.
- W1521198807 hasConcept C2779372316 @default.
- W1521198807 hasConcept C37977207 @default.
- W1521198807 hasConcept C49040817 @default.
- W1521198807 hasConcept C66938386 @default.
- W1521198807 hasConcept C87976508 @default.
- W1521198807 hasConcept C97355855 @default.
- W1521198807 hasConceptScore W1521198807C119599485 @default.
- W1521198807 hasConceptScore W1521198807C121332964 @default.
- W1521198807 hasConceptScore W1521198807C127413603 @default.
- W1521198807 hasConceptScore W1521198807C149912024 @default.
- W1521198807 hasConceptScore W1521198807C159985019 @default.
- W1521198807 hasConceptScore W1521198807C165801399 @default.
- W1521198807 hasConceptScore W1521198807C186541917 @default.
- W1521198807 hasConceptScore W1521198807C192562407 @default.
- W1521198807 hasConceptScore W1521198807C204366326 @default.
- W1521198807 hasConceptScore W1521198807C204530211 @default.
- W1521198807 hasConceptScore W1521198807C2779372316 @default.
- W1521198807 hasConceptScore W1521198807C37977207 @default.
- W1521198807 hasConceptScore W1521198807C49040817 @default.
- W1521198807 hasConceptScore W1521198807C66938386 @default.
- W1521198807 hasConceptScore W1521198807C87976508 @default.
- W1521198807 hasConceptScore W1521198807C97355855 @default.
- W1521198807 hasLocation W15211988071 @default.
- W1521198807 hasOpenAccess W1521198807 @default.
- W1521198807 hasPrimaryLocation W15211988071 @default.
- W1521198807 hasRelatedWork W1547759517 @default.
- W1521198807 hasRelatedWork W15834960 @default.
- W1521198807 hasRelatedWork W1979525739 @default.
- W1521198807 hasRelatedWork W1988625236 @default.
- W1521198807 hasRelatedWork W1988703376 @default.
- W1521198807 hasRelatedWork W2010768234 @default.
- W1521198807 hasRelatedWork W2021663758 @default.
- W1521198807 hasRelatedWork W2046747756 @default.
- W1521198807 hasRelatedWork W2062761274 @default.
- W1521198807 hasRelatedWork W2066346458 @default.
- W1521198807 hasRelatedWork W2098684321 @default.
- W1521198807 hasRelatedWork W2149805791 @default.
- W1521198807 hasRelatedWork W2163227433 @default.
- W1521198807 hasRelatedWork W2167091597 @default.
- W1521198807 hasRelatedWork W2173151709 @default.
- W1521198807 hasRelatedWork W2176335041 @default.
- W1521198807 hasRelatedWork W2319524554 @default.
- W1521198807 hasRelatedWork W251440009 @default.
- W1521198807 hasRelatedWork W2626380820 @default.
- W1521198807 hasRelatedWork W2802648638 @default.
- W1521198807 isParatext "false" @default.
- W1521198807 isRetracted "false" @default.
- W1521198807 magId "1521198807" @default.
- W1521198807 workType "article" @default.