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- W1521992042 abstract "E-beam lithographically produced masks used in the production of micro-optic structures must have a defined and high precision. Using the example of microspectrometers, the measurement deviations were studied, and correlated with the corresponding E-beam patterns." @default.
- W1521992042 created "2016-06-24" @default.
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- W1521992042 date "2003-06-25" @default.
- W1521992042 modified "2023-09-23" @default.
- W1521992042 title "Deviations in absorber shape of electron beam lithography using the example of LIGA-microspectrometers" @default.
- W1521992042 doi "https://doi.org/10.1109/omems.2002.1031465" @default.
- W1521992042 hasPublicationYear "2003" @default.
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