Matches in SemOpenAlex for { <https://semopenalex.org/work/W1522582920> ?p ?o ?g. }
- W1522582920 endingPage "307" @default.
- W1522582920 startingPage "279" @default.
- W1522582920 abstract "Most important factor to be controlled in compound semiconductor crystals is the deviation from the stoichiometric composition. Electrical, optical and crystallographic evaluation are applied to the GaAs samples prepared by annealing under controlled As vapor pressure. It is shown that the crystal imperfection and the deviation from the stoichiometric composition are reduced to be minimum under a specific As vapor pressure (optimum As vapor pressure; PAs,opt). PAs,opt is obtained to be similar regardless of the difference of dopant species, dopant concentration and conductivity type. Optimum vapor pressure is also obtained in other compound semiconductor crystals including GaP etc. The deviation from the stoichiometric composition affects the amphoteric manner of Si in GaAs. Vapor pressure control is also applied to the liquid phase epitaxy (LPE) in combination with the temperature difference method (TDM-CVP), and almost the same results are obtained. Temperature dependence of the optimum vapor pressure is almost the same both in annealing and LPE experiments. It confirms that the applying vapor pressure controls the composition of segregated crystals directly through the solution in LPE. Various methods including Rutherford backscattering (RBS) technique are applied to investigate the excess As atom-related defects in GaAs. The experimental results of crystal weight and X-ray anomalous transmission intensity measurements directly suggest the existence of interstitial As atoms. The RBS measurements with glazing exit angle configuration show the existence of the interstitial As atoms in As+-implanted GaAs, and clarify the stable interstitial sites to be <100> split and relaxed- bond center (r-BC) interstitialcy. Formation energy of excess As atom-related defects is determined to be 0.9–1.16eV by both the lattice constant measurements and the PHCAP measurements independently." @default.
- W1522582920 created "2016-06-24" @default.
- W1522582920 creator A5062075135 @default.
- W1522582920 date "1991-01-01" @default.
- W1522582920 modified "2023-10-09" @default.
- W1522582920 title "Stoichiometry Control of Compound Semiconductor Crystals" @default.
- W1522582920 cites W1972771882 @default.
- W1522582920 cites W1978382135 @default.
- W1522582920 cites W1979628072 @default.
- W1522582920 cites W1982338629 @default.
- W1522582920 cites W1993767046 @default.
- W1522582920 cites W1994953426 @default.
- W1522582920 cites W2002036642 @default.
- W1522582920 cites W2009960390 @default.
- W1522582920 cites W2039409621 @default.
- W1522582920 cites W2044966029 @default.
- W1522582920 cites W2054003673 @default.
- W1522582920 cites W2055679917 @default.
- W1522582920 cites W2058206884 @default.
- W1522582920 cites W2060699920 @default.
- W1522582920 cites W2060928391 @default.
- W1522582920 cites W2074237662 @default.
- W1522582920 cites W2082412902 @default.
- W1522582920 cites W2139581540 @default.
- W1522582920 cites W4240772461 @default.
- W1522582920 doi "https://doi.org/10.1007/978-3-662-09935-3_19" @default.
- W1522582920 hasPublicationYear "1991" @default.
- W1522582920 type Work @default.
- W1522582920 sameAs 1522582920 @default.
- W1522582920 citedByCount "1" @default.
- W1522582920 crossrefType "book-chapter" @default.
- W1522582920 hasAuthorship W1522582920A5062075135 @default.
- W1522582920 hasBestOaLocation W15225829202 @default.
- W1522582920 hasConcept C108225325 @default.
- W1522582920 hasConcept C110738630 @default.
- W1522582920 hasConcept C113196181 @default.
- W1522582920 hasConcept C144082473 @default.
- W1522582920 hasConcept C147789679 @default.
- W1522582920 hasConcept C159985019 @default.
- W1522582920 hasConcept C171250308 @default.
- W1522582920 hasConcept C178790620 @default.
- W1522582920 hasConcept C185592680 @default.
- W1522582920 hasConcept C19184958 @default.
- W1522582920 hasConcept C191952053 @default.
- W1522582920 hasConcept C192562407 @default.
- W1522582920 hasConcept C199360897 @default.
- W1522582920 hasConcept C2777855556 @default.
- W1522582920 hasConcept C2779227376 @default.
- W1522582920 hasConcept C2781285689 @default.
- W1522582920 hasConcept C41008148 @default.
- W1522582920 hasConcept C43617362 @default.
- W1522582920 hasConcept C49040817 @default.
- W1522582920 hasConcept C57863236 @default.
- W1522582920 hasConcept C8010536 @default.
- W1522582920 hasConceptScore W1522582920C108225325 @default.
- W1522582920 hasConceptScore W1522582920C110738630 @default.
- W1522582920 hasConceptScore W1522582920C113196181 @default.
- W1522582920 hasConceptScore W1522582920C144082473 @default.
- W1522582920 hasConceptScore W1522582920C147789679 @default.
- W1522582920 hasConceptScore W1522582920C159985019 @default.
- W1522582920 hasConceptScore W1522582920C171250308 @default.
- W1522582920 hasConceptScore W1522582920C178790620 @default.
- W1522582920 hasConceptScore W1522582920C185592680 @default.
- W1522582920 hasConceptScore W1522582920C19184958 @default.
- W1522582920 hasConceptScore W1522582920C191952053 @default.
- W1522582920 hasConceptScore W1522582920C192562407 @default.
- W1522582920 hasConceptScore W1522582920C199360897 @default.
- W1522582920 hasConceptScore W1522582920C2777855556 @default.
- W1522582920 hasConceptScore W1522582920C2779227376 @default.
- W1522582920 hasConceptScore W1522582920C2781285689 @default.
- W1522582920 hasConceptScore W1522582920C41008148 @default.
- W1522582920 hasConceptScore W1522582920C43617362 @default.
- W1522582920 hasConceptScore W1522582920C49040817 @default.
- W1522582920 hasConceptScore W1522582920C57863236 @default.
- W1522582920 hasConceptScore W1522582920C8010536 @default.
- W1522582920 hasLocation W15225829201 @default.
- W1522582920 hasLocation W15225829202 @default.
- W1522582920 hasOpenAccess W1522582920 @default.
- W1522582920 hasPrimaryLocation W15225829201 @default.
- W1522582920 hasRelatedWork W1237080147 @default.
- W1522582920 hasRelatedWork W1557233437 @default.
- W1522582920 hasRelatedWork W193276856 @default.
- W1522582920 hasRelatedWork W1963763930 @default.
- W1522582920 hasRelatedWork W1965930297 @default.
- W1522582920 hasRelatedWork W1986506420 @default.
- W1522582920 hasRelatedWork W1990440985 @default.
- W1522582920 hasRelatedWork W1993395296 @default.
- W1522582920 hasRelatedWork W1997168937 @default.
- W1522582920 hasRelatedWork W2035369694 @default.
- W1522582920 hasRelatedWork W2040848128 @default.
- W1522582920 hasRelatedWork W2046868423 @default.
- W1522582920 hasRelatedWork W2051267332 @default.
- W1522582920 hasRelatedWork W2071863852 @default.
- W1522582920 hasRelatedWork W2079217049 @default.
- W1522582920 hasRelatedWork W2083162101 @default.
- W1522582920 hasRelatedWork W2319870317 @default.
- W1522582920 hasRelatedWork W2582282825 @default.
- W1522582920 hasRelatedWork W2853450472 @default.