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- W1522602013 abstract "The influence of tensile and compression in-plane stresses of silicon plate have been investigated. The cases of square and rectangular form of elastic element have been considered. It was shown, that in-plane stresses can have a great influence on plate deflection and stresses distributions, that should be taken into account at designing of piezoresistive pressure sensors." @default.
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- W1522602013 date "2002-11-07" @default.
- W1522602013 modified "2023-09-23" @default.
- W1522602013 title "Calculation of deflection and mechanical stresses in plates of the rectangular form by variational and numerical methods" @default.
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- W1522602013 doi "https://doi.org/10.1109/korus.2000.866028" @default.
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