FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1523014215> ?p ?o ?g. }

• W1523014215 abstract "A study of doping the pMOS Lightly Doped Drain (LDD) by Plasma Immersion Ion Implantation (P3i) with BF3 is presented which demonstrates a better transistor performance compared to standard beam line Ion Implantation (I/I). The benefit of P3i comes from the broad angular distribution of the impinging ions thereby doping the poly‐silicon gate sidewall as well. Gate capacitance of short channel devices has been measured and clearly shows this improvement. This model is clearly supported by high resolution 2D‐carrier profiles using Scanning Spreading Resistance Microscopy (SSRM) which shows this gate sidewall doping. The broad angular distribution also implies a smaller directional sensitivity (to for instance the detailed gate edge shape) and leads to devices which are perfectly balanced, when Source and Drain electrode are switched." @default.
• W1523014215 created "2016-06-24" @default.
• W1523014215 creator A5003179513 @default.
• W1523014215 creator A5006006526 @default.
• W1523014215 creator A5010980164 @default.
• W1523014215 creator A5028107527 @default.
• W1523014215 creator A5030345235 @default.
• W1523014215 creator A5032424945 @default.
• W1523014215 creator A5048779687 @default.
• W1523014215 creator A5049003157 @default.
• W1523014215 creator A5056480896 @default.
• W1523014215 creator A5061852412 @default.
• W1523014215 creator A5065113949 @default.
• W1523014215 creator A5075204354 @default.
• W1523014215 creator A5076508833 @default.
• W1523014215 creator A5082043749 @default.
• W1523014215 creator A5083358214 @default.
• W1523014215 creator A5089819233 @default.
• W1523014215 date "2008-01-01" @default.
• W1523014215 modified "2023-09-27" @default.
• W1523014215 title "Performance Enhancement of PFET Planar Devices by Plasma Immersion Ion Implantation (P3I)" @default.
• W1523014215 cites W2124865178 @default.
• W1523014215 cites W2219536512 @default.
• W1523014215 doi "https://doi.org/10.1063/1.3033663" @default.
• W1523014215 hasPublicationYear "2008" @default.
• W1523014215 type Work @default.
• W1523014215 sameAs 1523014215 @default.
• W1523014215 citedByCount "2" @default.
• W1523014215 countsByYear W15230142152012 @default.
• W1523014215 crossrefType "proceedings-article" @default.
• W1523014215 hasAuthorship W1523014215A5003179513 @default.
• W1523014215 hasAuthorship W1523014215A5006006526 @default.
• W1523014215 hasAuthorship W1523014215A5010980164 @default.
• W1523014215 hasAuthorship W1523014215A5028107527 @default.
• W1523014215 hasAuthorship W1523014215A5030345235 @default.
• W1523014215 hasAuthorship W1523014215A5032424945 @default.
• W1523014215 hasAuthorship W1523014215A5048779687 @default.
• W1523014215 hasAuthorship W1523014215A5049003157 @default.
• W1523014215 hasAuthorship W1523014215A5056480896 @default.
• W1523014215 hasAuthorship W1523014215A5061852412 @default.
• W1523014215 hasAuthorship W1523014215A5065113949 @default.
• W1523014215 hasAuthorship W1523014215A5075204354 @default.
• W1523014215 hasAuthorship W1523014215A5076508833 @default.
• W1523014215 hasAuthorship W1523014215A5082043749 @default.
• W1523014215 hasAuthorship W1523014215A5083358214 @default.
• W1523014215 hasAuthorship W1523014215A5089819233 @default.
• W1523014215 hasConcept C119599485 @default.
• W1523014215 hasConcept C121332964 @default.
• W1523014215 hasConcept C121684516 @default.
• W1523014215 hasConcept C127413603 @default.
• W1523014215 hasConcept C134786449 @default.
• W1523014215 hasConcept C145148216 @default.
• W1523014215 hasConcept C147789679 @default.
• W1523014215 hasConcept C165801399 @default.
• W1523014215 hasConcept C172385210 @default.
• W1523014215 hasConcept C17525397 @default.
• W1523014215 hasConcept C178790620 @default.
• W1523014215 hasConcept C185592680 @default.
• W1523014215 hasConcept C192562407 @default.
• W1523014215 hasConcept C207521374 @default.
• W1523014215 hasConcept C27050352 @default.
• W1523014215 hasConcept C2778702798 @default.
• W1523014215 hasConcept C30066665 @default.
• W1523014215 hasConcept C41008148 @default.
• W1523014215 hasConcept C41823505 @default.
• W1523014215 hasConcept C49040817 @default.
• W1523014215 hasConcept C544956773 @default.
• W1523014215 hasConcept C57863236 @default.
• W1523014215 hasConcept C62520636 @default.
• W1523014215 hasConcept C82706917 @default.
• W1523014215 hasConceptScore W1523014215C119599485 @default.
• W1523014215 hasConceptScore W1523014215C121332964 @default.
• W1523014215 hasConceptScore W1523014215C121684516 @default.
• W1523014215 hasConceptScore W1523014215C127413603 @default.
• W1523014215 hasConceptScore W1523014215C134786449 @default.
• W1523014215 hasConceptScore W1523014215C145148216 @default.
• W1523014215 hasConceptScore W1523014215C147789679 @default.
• W1523014215 hasConceptScore W1523014215C165801399 @default.
• W1523014215 hasConceptScore W1523014215C172385210 @default.
• W1523014215 hasConceptScore W1523014215C17525397 @default.
• W1523014215 hasConceptScore W1523014215C178790620 @default.
• W1523014215 hasConceptScore W1523014215C185592680 @default.
• W1523014215 hasConceptScore W1523014215C192562407 @default.
• W1523014215 hasConceptScore W1523014215C207521374 @default.
• W1523014215 hasConceptScore W1523014215C27050352 @default.
• W1523014215 hasConceptScore W1523014215C2778702798 @default.
• W1523014215 hasConceptScore W1523014215C30066665 @default.
• W1523014215 hasConceptScore W1523014215C41008148 @default.
• W1523014215 hasConceptScore W1523014215C41823505 @default.
• W1523014215 hasConceptScore W1523014215C49040817 @default.
• W1523014215 hasConceptScore W1523014215C544956773 @default.
• W1523014215 hasConceptScore W1523014215C57863236 @default.
• W1523014215 hasConceptScore W1523014215C62520636 @default.
• W1523014215 hasConceptScore W1523014215C82706917 @default.
• W1523014215 hasLocation W15230142151 @default.
• W1523014215 hasOpenAccess W1523014215 @default.
• W1523014215 hasPrimaryLocation W15230142151 @default.
• W1523014215 hasRelatedWork W1523014215 @default.
• W1523014215 hasRelatedWork W1632647073 @default.
• W1523014215 hasRelatedWork W1975207241 @default.

• next