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• W1523426913 abstract "Conductive reliability modelling of Capacitive MEMS appears to be a problem of extent complexity due to the presence of the various components of which the system consists. In the current work we discuss a multi-physics modelling which includes all the aspects of the system. Additionally, we provide simulations through an implementation example of a MEMS with a floating electrode which includes a time dependent electromechanical part along with an embedded dynamical model of the current flux in the device. Finally, we compare our results with experimental data." @default.
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• W1523426913 date "2015-06-01" @default.
• W1523426913 modified "2023-09-26" @default.
• W1523426913 title "Conductive reliability modelling of capacitive MEMS" @default.
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• W1523426913 doi "https://doi.org/10.1109/prime.2015.7251397" @default.
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