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• W1524454076 abstract "This chapter contains sections titled: Introduction Experimental Model Description Results and Discussion Conclusions Acknowledgments References" @default.
• W1524454076 created "2016-06-24" @default.
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• W1524454076 date "2010-03-10" @default.
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• W1524454076 title "Diagnostics and Modeling of SiH4/H2 Plasmas for the Deposition of Microcrystalline Silicon: The Case of Dual-Frequency Sources" @default.
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• W1524454076 doi "https://doi.org/10.1002/9783527629749.ch21" @default.
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