Matches in SemOpenAlex for { <https://semopenalex.org/work/W1524969274> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W1524969274 abstract "In this paper we present guidelines for void free adhesive bonding of 10 cm diameter wafers. We have systematically investigated the influence of different bonding parameters on void formation in the bond. The layer thicknesses of the tested polymer coatings are between 1 /spl mu/m and 12 /spl mu/m. The polymer material, the bonding pressure and the pre-curing time and temperature for the polymer has shown significant influence on void formation in the bond. High bonding pressure and pre-curing times/temperatures that are specific to the polymer material counteract void formation. Process parameters for achieving void-free bonds using benzocyclobutene (BCB) and photoresist coatings as adhesive materials are given. Excellent bonding results have been achieved with BCB as bonding material." @default.
- W1524969274 created "2016-06-24" @default.
- W1524969274 creator A5017089023 @default.
- W1524969274 creator A5022165395 @default.
- W1524969274 creator A5061066057 @default.
- W1524969274 creator A5085711393 @default.
- W1524969274 date "2002-11-07" @default.
- W1524969274 modified "2023-10-03" @default.
- W1524969274 title "Void-free pull wafer adhesive bonding" @default.
- W1524969274 cites W1492229509 @default.
- W1524969274 cites W1913577785 @default.
- W1524969274 cites W1989038436 @default.
- W1524969274 cites W2033414592 @default.
- W1524969274 cites W2056009476 @default.
- W1524969274 cites W2111093596 @default.
- W1524969274 cites W2128198022 @default.
- W1524969274 cites W2129592195 @default.
- W1524969274 cites W2130507733 @default.
- W1524969274 cites W2149892116 @default.
- W1524969274 cites W2164595604 @default.
- W1524969274 cites W2615030411 @default.
- W1524969274 doi "https://doi.org/10.1109/memsys.2000.838524" @default.
- W1524969274 hasPublicationYear "2002" @default.
- W1524969274 type Work @default.
- W1524969274 sameAs 1524969274 @default.
- W1524969274 citedByCount "20" @default.
- W1524969274 countsByYear W15249692742013 @default.
- W1524969274 countsByYear W15249692742017 @default.
- W1524969274 countsByYear W15249692742020 @default.
- W1524969274 crossrefType "proceedings-article" @default.
- W1524969274 hasAuthorship W1524969274A5017089023 @default.
- W1524969274 hasAuthorship W1524969274A5022165395 @default.
- W1524969274 hasAuthorship W1524969274A5061066057 @default.
- W1524969274 hasAuthorship W1524969274A5085711393 @default.
- W1524969274 hasConcept C132976073 @default.
- W1524969274 hasConcept C134406635 @default.
- W1524969274 hasConcept C159985019 @default.
- W1524969274 hasConcept C160671074 @default.
- W1524969274 hasConcept C171250308 @default.
- W1524969274 hasConcept C192562407 @default.
- W1524969274 hasConcept C201414436 @default.
- W1524969274 hasConcept C201845621 @default.
- W1524969274 hasConcept C2776366733 @default.
- W1524969274 hasConcept C2779133538 @default.
- W1524969274 hasConcept C2779227376 @default.
- W1524969274 hasConcept C2779278059 @default.
- W1524969274 hasConcept C2779772531 @default.
- W1524969274 hasConcept C521977710 @default.
- W1524969274 hasConcept C68928338 @default.
- W1524969274 hasConceptScore W1524969274C132976073 @default.
- W1524969274 hasConceptScore W1524969274C134406635 @default.
- W1524969274 hasConceptScore W1524969274C159985019 @default.
- W1524969274 hasConceptScore W1524969274C160671074 @default.
- W1524969274 hasConceptScore W1524969274C171250308 @default.
- W1524969274 hasConceptScore W1524969274C192562407 @default.
- W1524969274 hasConceptScore W1524969274C201414436 @default.
- W1524969274 hasConceptScore W1524969274C201845621 @default.
- W1524969274 hasConceptScore W1524969274C2776366733 @default.
- W1524969274 hasConceptScore W1524969274C2779133538 @default.
- W1524969274 hasConceptScore W1524969274C2779227376 @default.
- W1524969274 hasConceptScore W1524969274C2779278059 @default.
- W1524969274 hasConceptScore W1524969274C2779772531 @default.
- W1524969274 hasConceptScore W1524969274C521977710 @default.
- W1524969274 hasConceptScore W1524969274C68928338 @default.
- W1524969274 hasLocation W15249692741 @default.
- W1524969274 hasOpenAccess W1524969274 @default.
- W1524969274 hasPrimaryLocation W15249692741 @default.
- W1524969274 hasRelatedWork W1553460192 @default.
- W1524969274 hasRelatedWork W1967514115 @default.
- W1524969274 hasRelatedWork W2000410238 @default.
- W1524969274 hasRelatedWork W2023923307 @default.
- W1524969274 hasRelatedWork W2026260155 @default.
- W1524969274 hasRelatedWork W2031872210 @default.
- W1524969274 hasRelatedWork W2032658378 @default.
- W1524969274 hasRelatedWork W2036356183 @default.
- W1524969274 hasRelatedWork W2040946508 @default.
- W1524969274 hasRelatedWork W2045521430 @default.
- W1524969274 hasRelatedWork W2078175237 @default.
- W1524969274 hasRelatedWork W2080706898 @default.
- W1524969274 hasRelatedWork W2083784951 @default.
- W1524969274 hasRelatedWork W2185756948 @default.
- W1524969274 hasRelatedWork W2289107111 @default.
- W1524969274 hasRelatedWork W2345279533 @default.
- W1524969274 hasRelatedWork W2544616704 @default.
- W1524969274 hasRelatedWork W2607135174 @default.
- W1524969274 hasRelatedWork W2735496757 @default.
- W1524969274 hasRelatedWork W2172826929 @default.
- W1524969274 isParatext "false" @default.
- W1524969274 isRetracted "false" @default.
- W1524969274 magId "1524969274" @default.
- W1524969274 workType "article" @default.