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• W1526014790 abstract "A monolithic gas sensor array fabricated in industrial CMOS-technology combined with post-CMOS micromachining is presented. The device comprises an array of three metal-oxide-coated micro-hotplates with integrated MOS-transistor heaters and the needed driving and signal-conditioning circuitry. The operating temperature of the SnO/sub 2/ metal oxide resistors varies between 200 and 350/spl deg/C. Three digital PID controllers enable individual temperature regulation. Interface and temperature control are implemented digitally, making a power-saving mode and temperature modulation, to enhance the analyte discrimination, applicable. Emphasis was placed on a modular system with the required analog circuitry reduced to a minimum." @default.
• W1526014790 created "2016-06-24" @default.
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• W1526014790 date "2004-11-22" @default.
• W1526014790 modified "2023-09-23" @default.
• W1526014790 title "A digital CMOS micro-hotplate array for analysis of environmentally relevant gases" @default.
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• W1526014790 doi "https://doi.org/10.1109/esscir.2004.1356677" @default.
• W1526014790 hasPublicationYear "2004" @default.
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