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- W1527657064 abstract "In this work, we present a comprehensive study on the effects of environmental pressure (P) and resonator dc-bias voltage for the phase noise of a monolithic CMOS-MEMS oscillator. In order to access the practical utility of CMOS-MEMS oscillators for versatile applications, a double-ended tuning fork (DETF) MEMS resonator oscillator is used as a case study. In the ambient pressure, the oscillation ensues at a minimum V P = 30V and shows a phase noise (PN) of −86 dBc/Hz at 1-kHz offset and −99 dBc/Hz at 1-MHz offset. On the other hand, a low-V P CMOS-MEMS oscillator with IC compatible voltage (i.e., V P = 3V, leading to an equivalent motional impedance R m of 100 MΩ) is also demonstrated in a vacuum chamber (P < 1 mTorr) with a PN of −94 dBc/Hz at 1-kHz offset and −98 dBc/Hz at 1-MHz offset, respectively." @default.
- W1527657064 created "2016-06-24" @default.
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- W1527657064 date "2015-04-01" @default.
- W1527657064 modified "2023-09-27" @default.
- W1527657064 title "Effects of pressure and bias voltage on the phase noise of CMOS-MEMS oscillators" @default.
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- W1527657064 doi "https://doi.org/10.1109/fcs.2015.7138812" @default.
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