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- W1528261310 abstract "For MOS devices belonging to 65 nm technology node and beyond, ultra‐shallow LDD junctions are needed in order to match requirements in terms of sheet resistance and doping profile. PLAsma Doping has been proposed and developed as an effective and viable technology capable to produce such junctions, while keeping high productivity. Furthermore, as the equipment is simpler and smaller than a common implanter, PLAsma Doping can be considered, from the cost of ownership point of view, an attractive solution also for those applications whose requirements are not so demanding; an example can be the junctions of a Flash Memory. Aim of this study is to evaluate, electrically, the compatibility of PLAsma Doping with a NOR Flash Memory belonging to 90 nm technology node. Results of PLAsma Doping experiment concerning the matching of the device parameters will be here presented. Further investigation is needed in order to exclude any possible effect on device reliability." @default.
- W1528261310 created "2016-06-24" @default.
- W1528261310 creator A5013391015 @default.
- W1528261310 creator A5014751036 @default.
- W1528261310 creator A5027196381 @default.
- W1528261310 creator A5037684383 @default.
- W1528261310 creator A5077309960 @default.
- W1528261310 date "2006-01-01" @default.
- W1528261310 modified "2023-09-24" @default.
- W1528261310 title "PLAsma Doping For P+ Junction Formation In 90 nm NOR Flash Memory Technology" @default.
- W1528261310 cites W1967751963 @default.
- W1528261310 cites W1977914772 @default.
- W1528261310 cites W2023202065 @default.
- W1528261310 cites W2039789790 @default.
- W1528261310 cites W2080780758 @default.
- W1528261310 cites W2104991345 @default.
- W1528261310 doi "https://doi.org/10.1063/1.2401500" @default.
- W1528261310 hasPublicationYear "2006" @default.
- W1528261310 type Work @default.
- W1528261310 sameAs 1528261310 @default.
- W1528261310 citedByCount "1" @default.
- W1528261310 countsByYear W15282613102016 @default.
- W1528261310 crossrefType "proceedings-article" @default.
- W1528261310 hasAuthorship W1528261310A5013391015 @default.
- W1528261310 hasAuthorship W1528261310A5014751036 @default.
- W1528261310 hasAuthorship W1528261310A5027196381 @default.
- W1528261310 hasAuthorship W1528261310A5037684383 @default.
- W1528261310 hasAuthorship W1528261310A5077309960 @default.
- W1528261310 hasConcept C120665830 @default.
- W1528261310 hasConcept C121332964 @default.
- W1528261310 hasConcept C149635348 @default.
- W1528261310 hasConcept C163258240 @default.
- W1528261310 hasConcept C192562407 @default.
- W1528261310 hasConcept C2776531357 @default.
- W1528261310 hasConcept C2777526259 @default.
- W1528261310 hasConcept C41008148 @default.
- W1528261310 hasConcept C43214815 @default.
- W1528261310 hasConcept C49040817 @default.
- W1528261310 hasConcept C57863236 @default.
- W1528261310 hasConcept C62520636 @default.
- W1528261310 hasConcept C62611344 @default.
- W1528261310 hasConcept C82706917 @default.
- W1528261310 hasConceptScore W1528261310C120665830 @default.
- W1528261310 hasConceptScore W1528261310C121332964 @default.
- W1528261310 hasConceptScore W1528261310C149635348 @default.
- W1528261310 hasConceptScore W1528261310C163258240 @default.
- W1528261310 hasConceptScore W1528261310C192562407 @default.
- W1528261310 hasConceptScore W1528261310C2776531357 @default.
- W1528261310 hasConceptScore W1528261310C2777526259 @default.
- W1528261310 hasConceptScore W1528261310C41008148 @default.
- W1528261310 hasConceptScore W1528261310C43214815 @default.
- W1528261310 hasConceptScore W1528261310C49040817 @default.
- W1528261310 hasConceptScore W1528261310C57863236 @default.
- W1528261310 hasConceptScore W1528261310C62520636 @default.
- W1528261310 hasConceptScore W1528261310C62611344 @default.
- W1528261310 hasConceptScore W1528261310C82706917 @default.
- W1528261310 hasLocation W15282613101 @default.
- W1528261310 hasOpenAccess W1528261310 @default.
- W1528261310 hasPrimaryLocation W15282613101 @default.
- W1528261310 hasRelatedWork W2069705003 @default.
- W1528261310 hasRelatedWork W2133109171 @default.
- W1528261310 hasRelatedWork W2365766931 @default.
- W1528261310 hasRelatedWork W2368138740 @default.
- W1528261310 hasRelatedWork W2372621381 @default.
- W1528261310 hasRelatedWork W2373540784 @default.
- W1528261310 hasRelatedWork W2382010046 @default.
- W1528261310 hasRelatedWork W2392839636 @default.
- W1528261310 hasRelatedWork W2394171788 @default.
- W1528261310 hasRelatedWork W2802661632 @default.
- W1528261310 isParatext "false" @default.
- W1528261310 isRetracted "false" @default.
- W1528261310 magId "1528261310" @default.
- W1528261310 workType "article" @default.