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- W1528899468 abstract "The characterisation of 1D and 2D stress distributions in poly-buffered LOCOS (PBL) isolation structures for using Micro-Raman mapping with TEM measurements of topography is presented. Measurements have been made on devices produced within the development of 0.35 ?m cmos isolation modules." @default.
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- W1528899468 date "1994-09-01" @default.
- W1528899468 modified "2023-10-11" @default.
- W1528899468 title "Characterisation of Mechanical Stress in Advanced PBL Isolation" @default.
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