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- W1528992812 abstract "Thin crystalline Si films (<100 μm) are used in many applications, such as sensors, photovoltaic absorbers, and optical and particle filters. Such thin crystalline Si films are difficult to handle and break easily under standard semiconductor processing. This paper presents a laser-welding process for the mechanical connection of a thin Si film with a separate stabilizing frame that is also made of crystalline Si. We measure the tear-off stresses to be in the range of 17–50 kPa. The supported thin Si films withstand typical semiconductor processes such as plasma deposition, oxidation, and wet chemical cleaning." @default.
- W1528992812 created "2016-06-24" @default.
- W1528992812 creator A5038368447 @default.
- W1528992812 creator A5039596428 @default.
- W1528992812 creator A5062748661 @default.
- W1528992812 creator A5071074747 @default.
- W1528992812 date "2015-09-01" @default.
- W1528992812 modified "2023-09-27" @default.
- W1528992812 title "Laser Welding for Processing of Thin Crystalline Si Wafers" @default.
- W1528992812 cites W1559641323 @default.
- W1528992812 cites W1975649448 @default.
- W1528992812 cites W1994624677 @default.
- W1528992812 cites W1998694977 @default.
- W1528992812 cites W2001160139 @default.
- W1528992812 cites W2006346404 @default.
- W1528992812 cites W2012301825 @default.
- W1528992812 cites W2013409917 @default.
- W1528992812 cites W2031689730 @default.
- W1528992812 cites W2043384229 @default.
- W1528992812 cites W2068024235 @default.
- W1528992812 cites W2070620443 @default.
- W1528992812 cites W2120320030 @default.
- W1528992812 cites W2149101547 @default.
- W1528992812 cites W2154183381 @default.
- W1528992812 cites W2156678540 @default.
- W1528992812 cites W2727420541 @default.
- W1528992812 cites W3193969776 @default.
- W1528992812 cites W81082500 @default.
- W1528992812 cites W84665116 @default.
- W1528992812 cites W1899792258 @default.
- W1528992812 doi "https://doi.org/10.1109/jphotov.2015.2449652" @default.
- W1528992812 hasPublicationYear "2015" @default.
- W1528992812 type Work @default.
- W1528992812 sameAs 1528992812 @default.
- W1528992812 citedByCount "0" @default.
- W1528992812 crossrefType "journal-article" @default.
- W1528992812 hasAuthorship W1528992812A5038368447 @default.
- W1528992812 hasAuthorship W1528992812A5039596428 @default.
- W1528992812 hasAuthorship W1528992812A5062748661 @default.
- W1528992812 hasAuthorship W1528992812A5071074747 @default.
- W1528992812 hasConcept C108225325 @default.
- W1528992812 hasConcept C120665830 @default.
- W1528992812 hasConcept C121332964 @default.
- W1528992812 hasConcept C159985019 @default.
- W1528992812 hasConcept C160671074 @default.
- W1528992812 hasConcept C171250308 @default.
- W1528992812 hasConcept C19067145 @default.
- W1528992812 hasConcept C192562407 @default.
- W1528992812 hasConcept C19474535 @default.
- W1528992812 hasConcept C49040817 @default.
- W1528992812 hasConcept C520434653 @default.
- W1528992812 hasConcept C544956773 @default.
- W1528992812 hasConceptScore W1528992812C108225325 @default.
- W1528992812 hasConceptScore W1528992812C120665830 @default.
- W1528992812 hasConceptScore W1528992812C121332964 @default.
- W1528992812 hasConceptScore W1528992812C159985019 @default.
- W1528992812 hasConceptScore W1528992812C160671074 @default.
- W1528992812 hasConceptScore W1528992812C171250308 @default.
- W1528992812 hasConceptScore W1528992812C19067145 @default.
- W1528992812 hasConceptScore W1528992812C192562407 @default.
- W1528992812 hasConceptScore W1528992812C19474535 @default.
- W1528992812 hasConceptScore W1528992812C49040817 @default.
- W1528992812 hasConceptScore W1528992812C520434653 @default.
- W1528992812 hasConceptScore W1528992812C544956773 @default.
- W1528992812 hasLocation W15289928121 @default.
- W1528992812 hasOpenAccess W1528992812 @default.
- W1528992812 hasPrimaryLocation W15289928121 @default.
- W1528992812 hasRelatedWork W1577341378 @default.
- W1528992812 hasRelatedWork W1595046064 @default.
- W1528992812 hasRelatedWork W1674357511 @default.
- W1528992812 hasRelatedWork W1975943059 @default.
- W1528992812 hasRelatedWork W1985298444 @default.
- W1528992812 hasRelatedWork W2057423586 @default.
- W1528992812 hasRelatedWork W2066343563 @default.
- W1528992812 hasRelatedWork W2114715812 @default.
- W1528992812 hasRelatedWork W2153717405 @default.
- W1528992812 hasRelatedWork W2167089080 @default.
- W1528992812 hasRelatedWork W2167684666 @default.
- W1528992812 hasRelatedWork W2169093066 @default.
- W1528992812 hasRelatedWork W2751347695 @default.
- W1528992812 hasRelatedWork W2949166963 @default.
- W1528992812 hasRelatedWork W2997395196 @default.
- W1528992812 hasRelatedWork W3025951061 @default.
- W1528992812 hasRelatedWork W3145603104 @default.
- W1528992812 hasRelatedWork W3149509801 @default.
- W1528992812 hasRelatedWork W3151597537 @default.
- W1528992812 hasRelatedWork W2835234099 @default.
- W1528992812 isParatext "false" @default.
- W1528992812 isRetracted "false" @default.
- W1528992812 magId "1528992812" @default.
- W1528992812 workType "article" @default.