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- W1530190717 abstract "At present, microelectromechanical system (MEMS) modeling and simulation is performed at various levels of granularity by MEMS engineers working on different aspects of the manufacture. Ab initio models are based on atomistic, quantum mechanical or molecular dynamics. Component-level models can include lumped models and finite element representations of a component such as a plate or a comb drive. Device models represent the working of the microstructure or nanostructure under investigation. System level models are used to model the entire microsystem. This chapter discusses design methodology of IntelliSense and implementation of system model extraction in IntelliSuite. IntelliSense provides tools that allow the user to simulate their devices at any stage of the design cycle. IntelliSuite has robust automated system model extraction routines that allow the user to create coupled macromodels that capture multiphysics including, electrostatics, mechanics, thermal behavior, and fluid damping. Controlled Vocabulary Terms finite element analysis; micromechanical devices; modelling" @default.
- W1530190717 created "2016-06-24" @default.
- W1530190717 creator A5089322933 @default.
- W1530190717 date "2013-02-06" @default.
- W1530190717 modified "2023-10-13" @default.
- W1530190717 title "Model Order Reduction Implementations in Commercial MEMS Design Environment" @default.
- W1530190717 cites W1973444653 @default.
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- W1530190717 doi "https://doi.org/10.1002/9783527647132.ch20" @default.
- W1530190717 hasPublicationYear "2013" @default.
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