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- W1533690708 abstract "The effect of incident angles on the morphology of silicon nanocone array induced by Ar+ sputtering at room temperature has been investigated. The investigation of scanning electron microscopy indicates that with the increment of incident angle from 30°, 45°, 60° to 75°, the density of silicon nanocone increases from 1–2×108 cm−2, 1–2×108 cm−2, 6–7×108 cm−2 to 1–2×109 cm−2, the apex angle of cone decreased from 70°, 55°, 36° to 27° and the aspect ratio of silicon nanocone decrease from 320/410 nm, 340/330 nm, 570/370 nm to 200/120 nm." @default.
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- W1533690708 date "2012-01-01" @default.
- W1533690708 modified "2023-09-26" @default.
- W1533690708 title "Effect of incident angles on the morphology of silicon nanocone array induced by Ar+ sputtering at room temperature" @default.
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- W1533690708 doi "https://doi.org/10.1049/mnl.2012.0374" @default.
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