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- W1534648082 abstract "The low-temperature photo-epitaxy technique has been developed using Si2H6 source gas. The Si2H6 gas is directly dissociated under UV light irradiation resulting in increase of growth rate. The epitaxial growth has been possible at a substrate temperature of 630°C. The nearly abrupt impurity profile is obtained which is advantageous for production of VLSI devices with small dimensions." @default.
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- W1534648082 date "1984-09-01" @default.
- W1534648082 modified "2023-09-24" @default.
- W1534648082 title "Disilane Photo-Epitaxy for VLSI" @default.
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