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• W1534854937 abstract "Extreme ultraviolet (EUV) spectroscopy is a powerful tool for studying fundamental processes in plasmas as well as for spectral characterization of EUV light sources and EUV optics. However, a simultaneous measurement covering a broadband spectral range is difficult to realize. Here, we propose a method for interferometric broadband Fourier spectroscopy connecting soft x ray and visible spectral ranges with moderate spectral resolution. We present an analytical model to recover the spectrum from a double-slit interferogram. We apply our model for spectral characterization of a partially coherent gas-discharge EUV light source operated with different gases in the spectral range between 10 and 110 nm wavelengths. Our approach allows a simple and fast broadband spectroscopy with fully or partially spatially coherent light sources, for instance, to characterize out-of-band radiation in EUV lithography applications." @default.
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• W1534854937 date "2015-06-10" @default.
• W1534854937 modified "2023-09-26" @default.
• W1534854937 title "Interferometric broadband Fourier spectroscopy with a partially coherent gas-discharge extreme ultraviolet light source" @default.
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• W1534854937 doi "https://doi.org/10.1364/ol.40.002818" @default.
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