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- W1535525092 abstract "The surface and near surface structure of glass and other optical materials is greatly influenced by the nature of the processes used to generate that surface. In high quality optics, the effects of process changes are often subtle and cannot be seen with conventional metrology. The presence of process induced damage in the near surface region is felt in a number of ways. Damage thresholds for optics subjected to high fluences are a particular problem in UV or high-powered laser systems. In high quality glass, the chemical and material composition of the outermost layer is influenced principally by the grinding, lapping and polishing processes used in fabrication. Performance in high fluence applications is often dominated by these process-induced inhomogeneities in the first few hundred nanometers of material. Each succeeding step in a process is designed to remove the damage from the previous operation. However, any force against the surface, no matter how slight will leave evidence of damage. Fabrication processes invariably create dislocations, cracks and plastic deformation between 100 nm and 500 nm below the surface. In glass polishing, the first 100 nm is comprised of material redeposited from the polishing solution. This redeposition layer is responsible for the extremely smooth surfaces that can be generated on glass. Unfortunately, this layer also conceals many flaws present in the deeper surface regions." @default.
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- W1535525092 date "1999-06-01" @default.
- W1535525092 modified "2023-09-23" @default.
- W1535525092 title "Subsurface structure in polished fused silica and diamond turned single crystal silicon" @default.
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