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• W1536151505 abstract "In advanced lithography, controlling the overlay budget is one of the most critical requirements. For device nodes at 10nm and below, there are many process-based sources of surface displacement that contribute to the lithography overlay budget that are independent of the lithography process, i.e. etch, anneal, CMP, etc. By developing an understanding of how process-induced surface displacement impacts overlay, displacement information can be fed-forward to the lithography tool for overlay correction during the lithography process. This paper describes the use of displacement measurement technology, the Coherent Gradient Sensing (CGS) interferometer, to characterize the effects of process-induced overlay error on the overlay budget through several processes in a typical semiconductor process flow. The CGS technique facilitates the generation of high-density displacement maps (>3 million points on 300mm wafer) such that the stresses induced die-by-die and process-by-process can be tracked in detail. Case studies are presented that summarize the use of the CGS data to reveal correlations between displacement variation and overlay variation, and demonstrate how feed forward can be applied for controlling overlay error." @default.
• W1536151505 created "2016-06-24" @default.
• W1536151505 creator A5016817098 @default.
• W1536151505 creator A5044166745 @default.
• W1536151505 creator A5051535866 @default.
• W1536151505 creator A5070018255 @default.
• W1536151505 creator A5080556169 @default.
• W1536151505 date "2015-05-01" @default.
• W1536151505 modified "2023-10-02" @default.
• W1536151505 title "A study of feed-forward strategies for overlay control in lithography processes using CGS technology" @default.
• W1536151505 cites W1969834273 @default.
• W1536151505 cites W1975308008 @default.
• W1536151505 cites W2035557680 @default.
• W1536151505 cites W2066874036 @default.
• W1536151505 cites W2105471702 @default.
• W1536151505 cites W2130924806 @default.
• W1536151505 cites W2153502028 @default.
• W1536151505 cites W2157401319 @default.
• W1536151505 doi "https://doi.org/10.1109/asmc.2015.7164427" @default.
• W1536151505 hasPublicationYear "2015" @default.
• W1536151505 type Work @default.
• W1536151505 sameAs 1536151505 @default.
• W1536151505 citedByCount "3" @default.
• W1536151505 countsByYear W15361515052016 @default.
• W1536151505 countsByYear W15361515052020 @default.
• W1536151505 countsByYear W15361515052023 @default.
• W1536151505 crossrefType "proceedings-article" @default.
• W1536151505 hasAuthorship W1536151505A5016817098 @default.
• W1536151505 hasAuthorship W1536151505A5044166745 @default.
• W1536151505 hasAuthorship W1536151505A5051535866 @default.
• W1536151505 hasAuthorship W1536151505A5070018255 @default.
• W1536151505 hasAuthorship W1536151505A5080556169 @default.
• W1536151505 hasConcept C107551265 @default.
• W1536151505 hasConcept C111919701 @default.
• W1536151505 hasConcept C127413603 @default.
• W1536151505 hasConcept C136085584 @default.
• W1536151505 hasConcept C15744967 @default.
• W1536151505 hasConcept C160671074 @default.
• W1536151505 hasConcept C162996421 @default.
• W1536151505 hasConcept C163581340 @default.
• W1536151505 hasConcept C171250308 @default.
• W1536151505 hasConcept C177409738 @default.
• W1536151505 hasConcept C192562407 @default.
• W1536151505 hasConcept C199360897 @default.
• W1536151505 hasConcept C200274948 @default.
• W1536151505 hasConcept C204223013 @default.
• W1536151505 hasConcept C24326235 @default.
• W1536151505 hasConcept C2779227376 @default.
• W1536151505 hasConcept C41008148 @default.
• W1536151505 hasConcept C49040817 @default.
• W1536151505 hasConcept C53524968 @default.
• W1536151505 hasConcept C542102704 @default.
• W1536151505 hasConcept C66018809 @default.
• W1536151505 hasConcept C93389723 @default.
• W1536151505 hasConcept C98045186 @default.
• W1536151505 hasConceptScore W1536151505C107551265 @default.
• W1536151505 hasConceptScore W1536151505C111919701 @default.
• W1536151505 hasConceptScore W1536151505C127413603 @default.
• W1536151505 hasConceptScore W1536151505C136085584 @default.
• W1536151505 hasConceptScore W1536151505C15744967 @default.
• W1536151505 hasConceptScore W1536151505C160671074 @default.
• W1536151505 hasConceptScore W1536151505C162996421 @default.
• W1536151505 hasConceptScore W1536151505C163581340 @default.
• W1536151505 hasConceptScore W1536151505C171250308 @default.
• W1536151505 hasConceptScore W1536151505C177409738 @default.
• W1536151505 hasConceptScore W1536151505C192562407 @default.
• W1536151505 hasConceptScore W1536151505C199360897 @default.
• W1536151505 hasConceptScore W1536151505C200274948 @default.
• W1536151505 hasConceptScore W1536151505C204223013 @default.
• W1536151505 hasConceptScore W1536151505C24326235 @default.
• W1536151505 hasConceptScore W1536151505C2779227376 @default.
• W1536151505 hasConceptScore W1536151505C41008148 @default.
• W1536151505 hasConceptScore W1536151505C49040817 @default.
• W1536151505 hasConceptScore W1536151505C53524968 @default.
• W1536151505 hasConceptScore W1536151505C542102704 @default.
• W1536151505 hasConceptScore W1536151505C66018809 @default.
• W1536151505 hasConceptScore W1536151505C93389723 @default.
• W1536151505 hasConceptScore W1536151505C98045186 @default.
• W1536151505 hasLocation W15361515051 @default.
• W1536151505 hasOpenAccess W1536151505 @default.
• W1536151505 hasPrimaryLocation W15361515051 @default.
• W1536151505 hasRelatedWork W154964681 @default.
• W1536151505 hasRelatedWork W1970699870 @default.
• W1536151505 hasRelatedWork W2002322265 @default.
• W1536151505 hasRelatedWork W2016248058 @default.
• W1536151505 hasRelatedWork W2043176779 @default.
• W1536151505 hasRelatedWork W2072380936 @default.
• W1536151505 hasRelatedWork W2075975668 @default.
• W1536151505 hasRelatedWork W2080912430 @default.
• W1536151505 hasRelatedWork W2080915148 @default.
• W1536151505 hasRelatedWork W2085569429 @default.
• W1536151505 hasRelatedWork W2102826016 @default.
• W1536151505 hasRelatedWork W2131590565 @default.
• W1536151505 hasRelatedWork W2439769129 @default.
• W1536151505 hasRelatedWork W2602555884 @default.
• W1536151505 hasRelatedWork W2752811288 @default.
• W1536151505 hasRelatedWork W2924671094 @default.
• W1536151505 hasRelatedWork W2605667579 @default.
• W1536151505 hasRelatedWork W2815121118 @default.
• W1536151505 hasRelatedWork W2847879696 @default.

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