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- W1536690873 abstract "Summary form only given. The output energy distribution of an excimer laser is typically asymmetric characterized by a nearly Gaussian distribution along the short axis and a flat-top distribution with Gaussian wings along the long axis. Many applications of UV lasers, however, call for a more homogeneous energy distribution with steep and well-defined edges. Diffractive optics provides powerful means for beam shaping. Simple, low-loss optical systems are possible, since multiple functions can be performed with a single element. Periodic elements, especially, are attractive, because they are not sensitive to lateral beam alignment or to variations in the incident beam shape. Here we demonstrate a periodic diffractive flat-top generator for an excimer laser. We make use of the partial coherence of the multi-spatial-mode laser source to smooth the output signal." @default.
- W1536690873 created "2016-06-24" @default.
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- W1536690873 date "2002-11-11" @default.
- W1536690873 modified "2023-09-25" @default.
- W1536690873 title "Excimer laser beam shaping using diffractive optics" @default.
- W1536690873 doi "https://doi.org/10.1109/cleoe.2000.910356" @default.
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