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- W1536857056 abstract "A new bi-directional valve-less silicon micro pump was proposed based on the analysis using an equivalent circuit model, and a performance of the fabricated pump was studied. The flow direction of the pump can be controlled by changing a driving waveform applied to a PZT plate fixed on a diaphragm. The feasibility of this new bidirectional pumping principle was verified by the experiments. The pump generated maximum flow rates of 220 nl/s for forward direction and 190 nl/s for backward direction and maximum pumping pressures of 9.7 kPa for forward direction and 8.3 kPa. for backward direction." @default.
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- W1536857056 date "2003-06-25" @default.
- W1536857056 modified "2023-09-25" @default.
- W1536857056 title "New bi-directional valve-less silicon micro pump controlled by driving waveform" @default.
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- W1536857056 doi "https://doi.org/10.1109/memsys.2002.984217" @default.
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