Matches in SemOpenAlex for { <https://semopenalex.org/work/W1538012064> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W1538012064 abstract "Summary form only given. A high-current broad ion beam which is extracted with multi-aperture electrodes from a large-volume plasma has come to be required not only for processing the size-growing silicon wafers but also for industrial applications to non-semiconductor materials. In order to study the spatial distributions of fragment ions from the chemical compound as the source material, we constructed a new apparatus equipped with a quadruple mass spectrometer to measure the ion-species distribution in the source plasma. The spectrometer is moved in vacuum, and local ratios of the fragment ions are measured by extracting the ions through small holes which are made on the wall separating the plasma and the spectrometer room. The experiment was carried out with CF/sub 4/ as the source material. The results suggest that the ion-species distributions are not consistent with the electron-density distribution. The ion-species distributions are strongly dependent on the molecule flow of the source material in the plasma chamber, but the electron-density distribution is not." @default.
- W1538012064 created "2016-06-24" @default.
- W1538012064 creator A5011217966 @default.
- W1538012064 creator A5012141864 @default.
- W1538012064 creator A5033466476 @default.
- W1538012064 creator A5034505216 @default.
- W1538012064 creator A5039027793 @default.
- W1538012064 creator A5048079278 @default.
- W1538012064 creator A5078641096 @default.
- W1538012064 date "2002-11-07" @default.
- W1538012064 modified "2023-09-26" @default.
- W1538012064 title "Ion-species distribution in a high-current broad beam" @default.
- W1538012064 doi "https://doi.org/10.1109/plasma.2000.855158" @default.
- W1538012064 hasPublicationYear "2002" @default.
- W1538012064 type Work @default.
- W1538012064 sameAs 1538012064 @default.
- W1538012064 citedByCount "0" @default.
- W1538012064 crossrefType "proceedings-article" @default.
- W1538012064 hasAuthorship W1538012064A5011217966 @default.
- W1538012064 hasAuthorship W1538012064A5012141864 @default.
- W1538012064 hasAuthorship W1538012064A5033466476 @default.
- W1538012064 hasAuthorship W1538012064A5034505216 @default.
- W1538012064 hasAuthorship W1538012064A5039027793 @default.
- W1538012064 hasAuthorship W1538012064A5048079278 @default.
- W1538012064 hasAuthorship W1538012064A5078641096 @default.
- W1538012064 hasConcept C107920040 @default.
- W1538012064 hasConcept C113196181 @default.
- W1538012064 hasConcept C120665830 @default.
- W1538012064 hasConcept C121332964 @default.
- W1538012064 hasConcept C145148216 @default.
- W1538012064 hasConcept C162356407 @default.
- W1538012064 hasConcept C178790620 @default.
- W1538012064 hasConcept C184779094 @default.
- W1538012064 hasConcept C185544564 @default.
- W1538012064 hasConcept C185592680 @default.
- W1538012064 hasConcept C188224857 @default.
- W1538012064 hasConcept C192562407 @default.
- W1538012064 hasConcept C2778220808 @default.
- W1538012064 hasConcept C33390570 @default.
- W1538012064 hasConcept C43617362 @default.
- W1538012064 hasConcept C49040817 @default.
- W1538012064 hasConcept C50774322 @default.
- W1538012064 hasConcept C544956773 @default.
- W1538012064 hasConcept C77671233 @default.
- W1538012064 hasConcept C82706917 @default.
- W1538012064 hasConcept C93106096 @default.
- W1538012064 hasConceptScore W1538012064C107920040 @default.
- W1538012064 hasConceptScore W1538012064C113196181 @default.
- W1538012064 hasConceptScore W1538012064C120665830 @default.
- W1538012064 hasConceptScore W1538012064C121332964 @default.
- W1538012064 hasConceptScore W1538012064C145148216 @default.
- W1538012064 hasConceptScore W1538012064C162356407 @default.
- W1538012064 hasConceptScore W1538012064C178790620 @default.
- W1538012064 hasConceptScore W1538012064C184779094 @default.
- W1538012064 hasConceptScore W1538012064C185544564 @default.
- W1538012064 hasConceptScore W1538012064C185592680 @default.
- W1538012064 hasConceptScore W1538012064C188224857 @default.
- W1538012064 hasConceptScore W1538012064C192562407 @default.
- W1538012064 hasConceptScore W1538012064C2778220808 @default.
- W1538012064 hasConceptScore W1538012064C33390570 @default.
- W1538012064 hasConceptScore W1538012064C43617362 @default.
- W1538012064 hasConceptScore W1538012064C49040817 @default.
- W1538012064 hasConceptScore W1538012064C50774322 @default.
- W1538012064 hasConceptScore W1538012064C544956773 @default.
- W1538012064 hasConceptScore W1538012064C77671233 @default.
- W1538012064 hasConceptScore W1538012064C82706917 @default.
- W1538012064 hasConceptScore W1538012064C93106096 @default.
- W1538012064 hasLocation W15380120641 @default.
- W1538012064 hasOpenAccess W1538012064 @default.
- W1538012064 hasPrimaryLocation W15380120641 @default.
- W1538012064 hasRelatedWork W1980824206 @default.
- W1538012064 hasRelatedWork W1982356176 @default.
- W1538012064 hasRelatedWork W1990607716 @default.
- W1538012064 hasRelatedWork W2010576113 @default.
- W1538012064 hasRelatedWork W2013308067 @default.
- W1538012064 hasRelatedWork W2021797313 @default.
- W1538012064 hasRelatedWork W2043296844 @default.
- W1538012064 hasRelatedWork W206117413 @default.
- W1538012064 hasRelatedWork W2061445865 @default.
- W1538012064 hasRelatedWork W2079321830 @default.
- W1538012064 hasRelatedWork W2082001264 @default.
- W1538012064 hasRelatedWork W2109411235 @default.
- W1538012064 hasRelatedWork W2147474134 @default.
- W1538012064 hasRelatedWork W2154367392 @default.
- W1538012064 hasRelatedWork W2248681495 @default.
- W1538012064 hasRelatedWork W230465237 @default.
- W1538012064 hasRelatedWork W3111980549 @default.
- W1538012064 hasRelatedWork W3137844282 @default.
- W1538012064 hasRelatedWork W3149051466 @default.
- W1538012064 hasRelatedWork W53692537 @default.
- W1538012064 isParatext "false" @default.
- W1538012064 isRetracted "false" @default.
- W1538012064 magId "1538012064" @default.
- W1538012064 workType "article" @default.