Matches in SemOpenAlex for { <https://semopenalex.org/work/W1538448004> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W1538448004 abstract "The fusion bond strength of glass tubes with standard silicon wafers is presented. Experiments with plain silicon wafers and those coated with silicon oxide and silicon nitride are presented. Results obtained are discussed in terms of homogeneity and strength of fusion bond. High pressure testing shows that the bond strength is large enough for most applications of fluidic interconnects. The bond strength for 525 /spl mu/m thick silicon with glass tubes having outer diameter of 6 mm and with wall thickness 2 mm, is more than 60 bars after annealing at a temperature of 800/spl deg/C." @default.
- W1538448004 created "2016-06-24" @default.
- W1538448004 creator A5023454562 @default.
- W1538448004 creator A5033618685 @default.
- W1538448004 creator A5037228905 @default.
- W1538448004 creator A5039709252 @default.
- W1538448004 creator A5075954647 @default.
- W1538448004 date "2005-08-24" @default.
- W1538448004 modified "2023-09-24" @default.
- W1538448004 title "Bond strength tests between silicon wafers and duran tubes (fusion bonded fluidic interconnects)" @default.
- W1538448004 cites W1480654527 @default.
- W1538448004 cites W1589056199 @default.
- W1538448004 cites W1919826058 @default.
- W1538448004 cites W1973097651 @default.
- W1538448004 cites W2018291573 @default.
- W1538448004 cites W2124034741 @default.
- W1538448004 cites W2130507733 @default.
- W1538448004 cites W2132098235 @default.
- W1538448004 cites W2414740820 @default.
- W1538448004 cites W2798792863 @default.
- W1538448004 cites W66470372 @default.
- W1538448004 doi "https://doi.org/10.1109/sensor.2005.1496572" @default.
- W1538448004 hasPublicationYear "2005" @default.
- W1538448004 type Work @default.
- W1538448004 sameAs 1538448004 @default.
- W1538448004 citedByCount "5" @default.
- W1538448004 crossrefType "proceedings-article" @default.
- W1538448004 hasAuthorship W1538448004A5023454562 @default.
- W1538448004 hasAuthorship W1538448004A5033618685 @default.
- W1538448004 hasAuthorship W1538448004A5037228905 @default.
- W1538448004 hasAuthorship W1538448004A5039709252 @default.
- W1538448004 hasAuthorship W1538448004A5075954647 @default.
- W1538448004 hasBestOaLocation W15384480042 @default.
- W1538448004 hasConcept C138885662 @default.
- W1538448004 hasConcept C158525013 @default.
- W1538448004 hasConcept C159096172 @default.
- W1538448004 hasConcept C159985019 @default.
- W1538448004 hasConcept C160671074 @default.
- W1538448004 hasConcept C192562407 @default.
- W1538448004 hasConcept C201414436 @default.
- W1538448004 hasConcept C2777431650 @default.
- W1538448004 hasConcept C2777855556 @default.
- W1538448004 hasConcept C2779133538 @default.
- W1538448004 hasConcept C2779227376 @default.
- W1538448004 hasConcept C41895202 @default.
- W1538448004 hasConcept C49040817 @default.
- W1538448004 hasConcept C53143962 @default.
- W1538448004 hasConcept C544956773 @default.
- W1538448004 hasConcept C68928338 @default.
- W1538448004 hasConceptScore W1538448004C138885662 @default.
- W1538448004 hasConceptScore W1538448004C158525013 @default.
- W1538448004 hasConceptScore W1538448004C159096172 @default.
- W1538448004 hasConceptScore W1538448004C159985019 @default.
- W1538448004 hasConceptScore W1538448004C160671074 @default.
- W1538448004 hasConceptScore W1538448004C192562407 @default.
- W1538448004 hasConceptScore W1538448004C201414436 @default.
- W1538448004 hasConceptScore W1538448004C2777431650 @default.
- W1538448004 hasConceptScore W1538448004C2777855556 @default.
- W1538448004 hasConceptScore W1538448004C2779133538 @default.
- W1538448004 hasConceptScore W1538448004C2779227376 @default.
- W1538448004 hasConceptScore W1538448004C41895202 @default.
- W1538448004 hasConceptScore W1538448004C49040817 @default.
- W1538448004 hasConceptScore W1538448004C53143962 @default.
- W1538448004 hasConceptScore W1538448004C544956773 @default.
- W1538448004 hasConceptScore W1538448004C68928338 @default.
- W1538448004 hasLocation W15384480041 @default.
- W1538448004 hasLocation W15384480042 @default.
- W1538448004 hasOpenAccess W1538448004 @default.
- W1538448004 hasPrimaryLocation W15384480041 @default.
- W1538448004 hasRelatedWork W1982398870 @default.
- W1538448004 hasRelatedWork W1983162481 @default.
- W1538448004 hasRelatedWork W1986739655 @default.
- W1538448004 hasRelatedWork W2014182551 @default.
- W1538448004 hasRelatedWork W2018019681 @default.
- W1538448004 hasRelatedWork W2023145959 @default.
- W1538448004 hasRelatedWork W2026374691 @default.
- W1538448004 hasRelatedWork W2029050535 @default.
- W1538448004 hasRelatedWork W2082363608 @default.
- W1538448004 hasRelatedWork W2082793058 @default.
- W1538448004 hasRelatedWork W2090713648 @default.
- W1538448004 hasRelatedWork W2106556432 @default.
- W1538448004 hasRelatedWork W2114240798 @default.
- W1538448004 hasRelatedWork W2168496954 @default.
- W1538448004 hasRelatedWork W2228105431 @default.
- W1538448004 hasRelatedWork W2275650696 @default.
- W1538448004 hasRelatedWork W2288818906 @default.
- W1538448004 hasRelatedWork W2886814325 @default.
- W1538448004 hasRelatedWork W3120989077 @default.
- W1538448004 hasRelatedWork W2184912345 @default.
- W1538448004 isParatext "false" @default.
- W1538448004 isRetracted "false" @default.
- W1538448004 magId "1538448004" @default.
- W1538448004 workType "article" @default.