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• W1538569715 abstract "In this paper a correlation between specific inline and electrical parameters has been deeply investigated. This study shows the impact of the flash gate intra-die and intra-wafer spread on the memory performances. A process recipe optimization has been evaluated to recover the effects of these variations. This optimization allows us to reduce the written threshold voltage intra-wafer spread by fifty percent." @default.
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• W1538569715 date "2015-05-01" @default.
• W1538569715 modified "2023-10-09" @default.
• W1538569715 title "Critical sensitivity of flash gate dimension spread on electrical performances for advanced embedded memory" @default.
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• W1538569715 doi "https://doi.org/10.1109/asmc.2015.7164428" @default.
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