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- W1539258705 abstract "Titanium thin films incorporated with helium are produced by pulsed laser deposition in an electron cyclotron resonance helium plasma environment.Helium is distributed evenly in the film and a relatively high He/Ti atomic ration(-20%) is obtained from the proton backscattering spectroscopy.This high concentration of helium leads to a surface blistering which is observed by scanning electron microsocopy.Laser repetition rate little influence on film characters.Substrate bias voltage is also changed for the helium incorporating mechanism study,and this is a helium ion implantation process during the film growth.Choosing suitable substrate bias voltage,one can avoid the damage produced by ion implantation,which is always present in general implantation case." @default.
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- W1539258705 date "2003-01-01" @default.
- W1539258705 modified "2023-09-24" @default.
- W1539258705 title "Helium—Charged Titanium Films Deposited by Pulsed Laser Deposition in an Electron—Cyclotron—Resonance helium Plasma Environment" @default.
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