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- W1539404548 abstract "Electron beam (EB) lithography and direct patterning of low-dielectric-constant (low-k) materials are two crucial issues of nanofabrication technologies. In this paper, we propose direct patterning of negative tone hydrogen silsesquioxane (HSQ) film of which can replace the use of resist processes including resist coating and stripping." @default.
- W1539404548 created "2016-06-24" @default.
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- W1539404548 date "2002-11-13" @default.
- W1539404548 modified "2023-10-17" @default.
- W1539404548 title "Direct patterning on low dielectric constant materials with electron beam lithography" @default.
- W1539404548 cites W2070876453 @default.
- W1539404548 doi "https://doi.org/10.1109/imnc.2001.984143" @default.
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