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• W1539789447 abstract "The control of electron energy probability functions (EEPFs) in low pressure partially ionized plasmas is typically accomplished through the format of the applied power. For example, through the use of pulse power, the EEPF can be modulated to produce shapes not possible under continuous wave excitation. This technique uses internal control. In this paper, we discuss a method for external control of EEPFs by transport of electrons between separately powered inductively coupled plasmas (ICPs). The reactor incorporates dual ICP sources (main and auxiliary) in a tandem geometry whose plasma volumes are separated by a grid. The auxiliary ICP is continuously powered while the main ICP is pulsed. Langmuir probe measurements of the EEPFs during the afterglow of the main ICP suggests that transport of hot electrons from the auxiliary plasma provided what is effectively an external source of energetic electrons. The tail of the EEPF and bulk electron temperature were then elevated in the afterglow of the main ICP by this external source of power. Results from a computer simulation for the evolution of the EEPFs concur with measured trends." @default.
• W1539789447 created "2016-06-24" @default.
• W1539789447 creator A5004545218 @default.
• W1539789447 creator A5009306289 @default.
• W1539789447 creator A5019031173 @default.
• W1539789447 creator A5020147975 @default.
• W1539789447 creator A5035296819 @default.
• W1539789447 creator A5051005803 @default.
• W1539789447 creator A5073064772 @default.
• W1539789447 date "2015-08-27" @default.
• W1539789447 modified "2023-10-16" @default.
• W1539789447 title "External control of electron energy distributions in a dual tandem inductively coupled plasma" @default.
• W1539789447 cites W1967161697 @default.
• W1539789447 cites W1969431184 @default.
• W1539789447 cites W1969852806 @default.
• W1539789447 cites W1971602511 @default.
• W1539789447 cites W1980384998 @default.
• W1539789447 cites W1995846590 @default.
• W1539789447 cites W2006852677 @default.
• W1539789447 cites W2016600752 @default.
• W1539789447 cites W2023106435 @default.
• W1539789447 cites W2026901898 @default.
• W1539789447 cites W2028640377 @default.
• W1539789447 cites W2038147013 @default.
• W1539789447 cites W2048185184 @default.
• W1539789447 cites W2049575128 @default.
• W1539789447 cites W2057102583 @default.
• W1539789447 cites W2080097088 @default.
• W1539789447 cites W2088414604 @default.
• W1539789447 cites W2098997637 @default.
• W1539789447 cites W2102632614 @default.
• W1539789447 cites W2141561848 @default.
• W1539789447 cites W2152122174 @default.
• W1539789447 cites W2242895055 @default.
• W1539789447 doi "https://doi.org/10.1063/1.4928870" @default.
• W1539789447 hasPublicationYear "2015" @default.
• W1539789447 type Work @default.
• W1539789447 sameAs 1539789447 @default.
• W1539789447 citedByCount "15" @default.
• W1539789447 countsByYear W15397894472015 @default.
• W1539789447 countsByYear W15397894472016 @default.
• W1539789447 countsByYear W15397894472017 @default.
• W1539789447 countsByYear W15397894472018 @default.
• W1539789447 countsByYear W15397894472019 @default.
• W1539789447 countsByYear W15397894472020 @default.
• W1539789447 countsByYear W15397894472021 @default.
• W1539789447 countsByYear W15397894472022 @default.
• W1539789447 crossrefType "journal-article" @default.
• W1539789447 hasAuthorship W1539789447A5004545218 @default.
• W1539789447 hasAuthorship W1539789447A5009306289 @default.
• W1539789447 hasAuthorship W1539789447A5019031173 @default.
• W1539789447 hasAuthorship W1539789447A5020147975 @default.
• W1539789447 hasAuthorship W1539789447A5035296819 @default.
• W1539789447 hasAuthorship W1539789447A5051005803 @default.
• W1539789447 hasAuthorship W1539789447A5073064772 @default.
• W1539789447 hasBestOaLocation W15397894471 @default.
• W1539789447 hasConcept C121332964 @default.
• W1539789447 hasConcept C1276947 @default.
• W1539789447 hasConcept C145148216 @default.
• W1539789447 hasConcept C147120987 @default.
• W1539789447 hasConcept C17599544 @default.
• W1539789447 hasConcept C176118016 @default.
• W1539789447 hasConcept C184779094 @default.
• W1539789447 hasConcept C185544564 @default.
• W1539789447 hasConcept C185592680 @default.
• W1539789447 hasConcept C192039680 @default.
• W1539789447 hasConcept C192562407 @default.
• W1539789447 hasConcept C198291218 @default.
• W1539789447 hasConcept C22175881 @default.
• W1539789447 hasConcept C2777036043 @default.
• W1539789447 hasConcept C43503373 @default.
• W1539789447 hasConcept C62520636 @default.
• W1539789447 hasConcept C82706917 @default.
• W1539789447 hasConcept C95974651 @default.
• W1539789447 hasConceptScore W1539789447C121332964 @default.
• W1539789447 hasConceptScore W1539789447C1276947 @default.
• W1539789447 hasConceptScore W1539789447C145148216 @default.
• W1539789447 hasConceptScore W1539789447C147120987 @default.
• W1539789447 hasConceptScore W1539789447C17599544 @default.
• W1539789447 hasConceptScore W1539789447C176118016 @default.
• W1539789447 hasConceptScore W1539789447C184779094 @default.
• W1539789447 hasConceptScore W1539789447C185544564 @default.
• W1539789447 hasConceptScore W1539789447C185592680 @default.
• W1539789447 hasConceptScore W1539789447C192039680 @default.
• W1539789447 hasConceptScore W1539789447C192562407 @default.
• W1539789447 hasConceptScore W1539789447C198291218 @default.
• W1539789447 hasConceptScore W1539789447C22175881 @default.
• W1539789447 hasConceptScore W1539789447C2777036043 @default.
• W1539789447 hasConceptScore W1539789447C43503373 @default.
• W1539789447 hasConceptScore W1539789447C62520636 @default.
• W1539789447 hasConceptScore W1539789447C82706917 @default.
• W1539789447 hasConceptScore W1539789447C95974651 @default.
• W1539789447 hasFunder F4320306076 @default.
• W1539789447 hasFunder F4320306084 @default.
• W1539789447 hasFunder F4320306087 @default.
• W1539789447 hasIssue "8" @default.
• W1539789447 hasLocation W15397894471 @default.
• W1539789447 hasLocation W15397894472 @default.
• W1539789447 hasOpenAccess W1539789447 @default.
• W1539789447 hasPrimaryLocation W15397894471 @default.

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