Matches in SemOpenAlex for { <https://semopenalex.org/work/W1540804990> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W1540804990 abstract "The study of local Random Telegraphic Noise (RTN) in HfO 2 dielectric blanket films using Scanning Tunneling Microscopy (STM) is presented in this work. Analysis of the trap spectroscopy in the dielectric by low-voltage sensing of RTN signals at different stages of stress induced leakage current (SILC) degradation and subsequent breakdown has been performed. This technique is well suited to analyze the localized progressive evolution of defects, their contribution to RTN, conduction variability and eventual failure of the high-κ dielectric. To the best of our knowledge, this is one of the first report of successful RTN sensing using STM on thin insulating films and our results indicate the potential of STM-based noise analysis for high-resolution (∼10–20 nm) localized mapping of defects, which is hard to achieve at the device-level." @default.
- W1540804990 created "2016-06-24" @default.
- W1540804990 creator A5007031788 @default.
- W1540804990 creator A5025103901 @default.
- W1540804990 creator A5030074312 @default.
- W1540804990 creator A5033345953 @default.
- W1540804990 creator A5034793030 @default.
- W1540804990 creator A5045559599 @default.
- W1540804990 creator A5064500828 @default.
- W1540804990 date "2015-06-01" @default.
- W1540804990 modified "2023-09-27" @default.
- W1540804990 title "Localized Random Telegraphic Noise Study in HfO<inf>2</inf> dielectric stacks using Scanning Tunneling Microscopy — Analysis of process and stress-induced traps" @default.
- W1540804990 cites W1976290199 @default.
- W1540804990 cites W1989021810 @default.
- W1540804990 cites W2003961483 @default.
- W1540804990 cites W2044941608 @default.
- W1540804990 cites W2068430664 @default.
- W1540804990 doi "https://doi.org/10.1109/ipfa.2015.7224356" @default.
- W1540804990 hasPublicationYear "2015" @default.
- W1540804990 type Work @default.
- W1540804990 sameAs 1540804990 @default.
- W1540804990 citedByCount "2" @default.
- W1540804990 countsByYear W15408049902020 @default.
- W1540804990 countsByYear W15408049902022 @default.
- W1540804990 crossrefType "proceedings-article" @default.
- W1540804990 hasAuthorship W1540804990A5007031788 @default.
- W1540804990 hasAuthorship W1540804990A5025103901 @default.
- W1540804990 hasAuthorship W1540804990A5030074312 @default.
- W1540804990 hasAuthorship W1540804990A5033345953 @default.
- W1540804990 hasAuthorship W1540804990A5034793030 @default.
- W1540804990 hasAuthorship W1540804990A5045559599 @default.
- W1540804990 hasAuthorship W1540804990A5064500828 @default.
- W1540804990 hasConcept C115961682 @default.
- W1540804990 hasConcept C120398109 @default.
- W1540804990 hasConcept C120665830 @default.
- W1540804990 hasConcept C121332964 @default.
- W1540804990 hasConcept C127413603 @default.
- W1540804990 hasConcept C133386390 @default.
- W1540804990 hasConcept C138885662 @default.
- W1540804990 hasConcept C139719470 @default.
- W1540804990 hasConcept C147080431 @default.
- W1540804990 hasConcept C154945302 @default.
- W1540804990 hasConcept C162324750 @default.
- W1540804990 hasConcept C171250308 @default.
- W1540804990 hasConcept C192562407 @default.
- W1540804990 hasConcept C21036866 @default.
- W1540804990 hasConcept C24326235 @default.
- W1540804990 hasConcept C2777042071 @default.
- W1540804990 hasConcept C41008148 @default.
- W1540804990 hasConcept C41895202 @default.
- W1540804990 hasConcept C49040817 @default.
- W1540804990 hasConcept C6518042 @default.
- W1540804990 hasConcept C70401718 @default.
- W1540804990 hasConcept C86642149 @default.
- W1540804990 hasConcept C99498987 @default.
- W1540804990 hasConceptScore W1540804990C115961682 @default.
- W1540804990 hasConceptScore W1540804990C120398109 @default.
- W1540804990 hasConceptScore W1540804990C120665830 @default.
- W1540804990 hasConceptScore W1540804990C121332964 @default.
- W1540804990 hasConceptScore W1540804990C127413603 @default.
- W1540804990 hasConceptScore W1540804990C133386390 @default.
- W1540804990 hasConceptScore W1540804990C138885662 @default.
- W1540804990 hasConceptScore W1540804990C139719470 @default.
- W1540804990 hasConceptScore W1540804990C147080431 @default.
- W1540804990 hasConceptScore W1540804990C154945302 @default.
- W1540804990 hasConceptScore W1540804990C162324750 @default.
- W1540804990 hasConceptScore W1540804990C171250308 @default.
- W1540804990 hasConceptScore W1540804990C192562407 @default.
- W1540804990 hasConceptScore W1540804990C21036866 @default.
- W1540804990 hasConceptScore W1540804990C24326235 @default.
- W1540804990 hasConceptScore W1540804990C2777042071 @default.
- W1540804990 hasConceptScore W1540804990C41008148 @default.
- W1540804990 hasConceptScore W1540804990C41895202 @default.
- W1540804990 hasConceptScore W1540804990C49040817 @default.
- W1540804990 hasConceptScore W1540804990C6518042 @default.
- W1540804990 hasConceptScore W1540804990C70401718 @default.
- W1540804990 hasConceptScore W1540804990C86642149 @default.
- W1540804990 hasConceptScore W1540804990C99498987 @default.
- W1540804990 hasLocation W15408049901 @default.
- W1540804990 hasOpenAccess W1540804990 @default.
- W1540804990 hasPrimaryLocation W15408049901 @default.
- W1540804990 hasRelatedWork W1991730544 @default.
- W1540804990 hasRelatedWork W2010390859 @default.
- W1540804990 hasRelatedWork W2043673973 @default.
- W1540804990 hasRelatedWork W2076380677 @default.
- W1540804990 hasRelatedWork W2085068016 @default.
- W1540804990 hasRelatedWork W2092872563 @default.
- W1540804990 hasRelatedWork W2355621656 @default.
- W1540804990 hasRelatedWork W2374646600 @default.
- W1540804990 hasRelatedWork W2410867535 @default.
- W1540804990 hasRelatedWork W2863738027 @default.
- W1540804990 isParatext "false" @default.
- W1540804990 isRetracted "false" @default.
- W1540804990 magId "1540804990" @default.
- W1540804990 workType "article" @default.