Matches in SemOpenAlex for { <https://semopenalex.org/work/W1540896247> ?p ?o ?g. }
- W1540896247 abstract "SPM-based lithography, referred to as Scanning Probe Lithography (SPL), is compatible with a wide range of surfaces, including organic resists. SPL by means of electron beam exposure of types of organic resists using STM or conducting AFM is described in this review. The emphasis is placed on the qualitative analyses of the factors in affecting exposure resolution, which include the properties of organic resists, exposure dose, underlying substrates and tip materials, and relative humidity. On the basis of the foresaid analyses, the tip-sample bias is considered to be a crucial factor in the successful application of this SPL and the tendency of the research concerned is proposed." @default.
- W1540896247 created "2016-06-24" @default.
- W1540896247 creator A5007309630 @default.
- W1540896247 creator A5007881925 @default.
- W1540896247 creator A5049376024 @default.
- W1540896247 creator A5074988870 @default.
- W1540896247 creator A5084334249 @default.
- W1540896247 date "2004-01-24" @default.
- W1540896247 modified "2023-09-26" @default.
- W1540896247 title "The overview of scanning probe lithography by electron beam exposure of organic resists" @default.
- W1540896247 cites W1967315991 @default.
- W1540896247 cites W1967362262 @default.
- W1540896247 cites W1970041600 @default.
- W1540896247 cites W1970751967 @default.
- W1540896247 cites W1972042025 @default.
- W1540896247 cites W1975706739 @default.
- W1540896247 cites W1977590808 @default.
- W1540896247 cites W1978956346 @default.
- W1540896247 cites W1980620978 @default.
- W1540896247 cites W1982915031 @default.
- W1540896247 cites W1990971622 @default.
- W1540896247 cites W1994386437 @default.
- W1540896247 cites W2002356819 @default.
- W1540896247 cites W2002394574 @default.
- W1540896247 cites W2008910165 @default.
- W1540896247 cites W2010639249 @default.
- W1540896247 cites W2016048665 @default.
- W1540896247 cites W2017617506 @default.
- W1540896247 cites W2021078242 @default.
- W1540896247 cites W2023608140 @default.
- W1540896247 cites W2026543316 @default.
- W1540896247 cites W2028507229 @default.
- W1540896247 cites W2032892384 @default.
- W1540896247 cites W2035566134 @default.
- W1540896247 cites W2035849023 @default.
- W1540896247 cites W2039333006 @default.
- W1540896247 cites W2039395161 @default.
- W1540896247 cites W2042949458 @default.
- W1540896247 cites W2043615511 @default.
- W1540896247 cites W2043783168 @default.
- W1540896247 cites W2045531107 @default.
- W1540896247 cites W2049126308 @default.
- W1540896247 cites W2062572417 @default.
- W1540896247 cites W2063902790 @default.
- W1540896247 cites W2065033818 @default.
- W1540896247 cites W2068087475 @default.
- W1540896247 cites W2071381979 @default.
- W1540896247 cites W2071702983 @default.
- W1540896247 cites W2072707402 @default.
- W1540896247 cites W2074163400 @default.
- W1540896247 cites W2078436256 @default.
- W1540896247 cites W2079433399 @default.
- W1540896247 cites W2079961552 @default.
- W1540896247 cites W2080940989 @default.
- W1540896247 cites W2088874011 @default.
- W1540896247 cites W2089124885 @default.
- W1540896247 cites W2089137058 @default.
- W1540896247 cites W2093455478 @default.
- W1540896247 cites W2145114911 @default.
- W1540896247 cites W2150587702 @default.
- W1540896247 cites W2153371630 @default.
- W1540896247 cites W2249448059 @default.
- W1540896247 cites W2080746991 @default.
- W1540896247 doi "https://doi.org/10.1109/nano.2003.1231034" @default.
- W1540896247 hasPublicationYear "2004" @default.
- W1540896247 type Work @default.
- W1540896247 sameAs 1540896247 @default.
- W1540896247 citedByCount "2" @default.
- W1540896247 countsByYear W15408962472018 @default.
- W1540896247 crossrefType "proceedings-article" @default.
- W1540896247 hasAuthorship W1540896247A5007309630 @default.
- W1540896247 hasAuthorship W1540896247A5007881925 @default.
- W1540896247 hasAuthorship W1540896247A5049376024 @default.
- W1540896247 hasAuthorship W1540896247A5074988870 @default.
- W1540896247 hasAuthorship W1540896247A5084334249 @default.
- W1540896247 hasConcept C120665830 @default.
- W1540896247 hasConcept C121332964 @default.
- W1540896247 hasConcept C159985019 @default.
- W1540896247 hasConcept C171250308 @default.
- W1540896247 hasConcept C192562407 @default.
- W1540896247 hasConcept C200274948 @default.
- W1540896247 hasConcept C204223013 @default.
- W1540896247 hasConcept C26771246 @default.
- W1540896247 hasConcept C2779227376 @default.
- W1540896247 hasConcept C41794268 @default.
- W1540896247 hasConcept C49040817 @default.
- W1540896247 hasConcept C53524968 @default.
- W1540896247 hasConceptScore W1540896247C120665830 @default.
- W1540896247 hasConceptScore W1540896247C121332964 @default.
- W1540896247 hasConceptScore W1540896247C159985019 @default.
- W1540896247 hasConceptScore W1540896247C171250308 @default.
- W1540896247 hasConceptScore W1540896247C192562407 @default.
- W1540896247 hasConceptScore W1540896247C200274948 @default.
- W1540896247 hasConceptScore W1540896247C204223013 @default.
- W1540896247 hasConceptScore W1540896247C26771246 @default.
- W1540896247 hasConceptScore W1540896247C2779227376 @default.
- W1540896247 hasConceptScore W1540896247C41794268 @default.
- W1540896247 hasConceptScore W1540896247C49040817 @default.
- W1540896247 hasConceptScore W1540896247C53524968 @default.
- W1540896247 hasLocation W15408962471 @default.