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- W1541432372 abstract "Investigation of the mechanical behavior in materials with micro- or nano-scale dimensions is one of the significant concerns in the MEMS field because the knowledge that has been obtained in the material tests is directly linked to the performance and reliability of MEMS devices. For such the minute specimens, the uniaxial tensile test is the most popular material evaluation method as with the macroscopic specimens. The many efforts to accurately measure the mechanical properties through the test are being made consistently. This chapter is organized basically by three topics. First, the uniaxial tensile test techniques for a film specimen are described. In particular, the technical issues regarding specimen chucking and strain measurement are mentioned. Second, the material constants that should be estimated for the MEMS design are presented. In this topic, the four different materials, such as a brittle material, a metallic material, a polymer film and a shape memory alloy film, have been covered. Third, a short description about the fatigue test is given. Finally, a brief outlook towards the development of high-quality MEMS devices is stated in the light of the importance of the reliable design that is conducted using the appropriate material constants." @default.
- W1541432372 created "2016-06-24" @default.
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- W1541432372 date "2007-12-12" @default.
- W1541432372 modified "2023-09-27" @default.
- W1541432372 title "Uniaxial Tensile Test for MEMS Materials" @default.
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- W1541432372 doi "https://doi.org/10.1002/9783527622139.ch4" @default.
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