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Matches in SemOpenAlex for { <https://semopenalex.org/work/W1542643044> ?p ?o ?g. }

• W1542643044 abstract "A new concept, promoting emitter diffusion (PED) process, by using high-temperature annealing, is proposed for fabricating high-performance SiGe HBTs. Both the cut-off frequency and maximum oscillation frequency exceeded 200 GHz when the annealing temperature was increased from 885/spl deg/C to 1000/spl deg/C. This PED process concept is based on the fact that the increased phosphorus diffusion can more than compensate for increased boron diffusion and decreased base thickness." @default.
• W1542643044 created "2016-06-24" @default.
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• W1542643044 date "2004-12-23" @default.
• W1542643044 modified "2023-09-25" @default.
• W1542643044 title "Optimization of vertical profiles of SiGe HBT/BiCMOS by promoting emitter diffusion process" @default.
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• W1542643044 doi "https://doi.org/10.1109/bipol.2004.1365753" @default.
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