Matches in SemOpenAlex for { <https://semopenalex.org/work/W1542776278> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W1542776278 abstract "The authors propose the fabrication method for a diamond mold for imprint lithography to transfer the dot pattern onto recording media. It is expected that more high density and small dot patterns will be imprinted using the diamond mold. A diamond thin film with a thickness of about 10 /spl mu/m was deposited on a Si wafer using hot-filament chemical vapor deposition (HF-CVD). The wafer with the diamond film was anodically bonded with 5 mm thick Pyrex glass via sputtered Al film as an adhesive layer. An aligned hole pattern can be successfully transferred on the diamond film by oxygen fast atom beam etching." @default.
- W1542776278 created "2016-06-24" @default.
- W1542776278 creator A5029720786 @default.
- W1542776278 creator A5037713271 @default.
- W1542776278 creator A5071245735 @default.
- W1542776278 creator A5072264041 @default.
- W1542776278 creator A5077280543 @default.
- W1542776278 date "2003-08-27" @default.
- W1542776278 modified "2023-09-22" @default.
- W1542776278 title "Fabrication of diamond mold for imprint lithography" @default.
- W1542776278 doi "https://doi.org/10.1109/imnc.2002.1178595" @default.
- W1542776278 hasPublicationYear "2003" @default.
- W1542776278 type Work @default.
- W1542776278 sameAs 1542776278 @default.
- W1542776278 citedByCount "0" @default.
- W1542776278 crossrefType "proceedings-article" @default.
- W1542776278 hasAuthorship W1542776278A5029720786 @default.
- W1542776278 hasAuthorship W1542776278A5037713271 @default.
- W1542776278 hasAuthorship W1542776278A5071245735 @default.
- W1542776278 hasAuthorship W1542776278A5072264041 @default.
- W1542776278 hasAuthorship W1542776278A5077280543 @default.
- W1542776278 hasConcept C100460472 @default.
- W1542776278 hasConcept C105487726 @default.
- W1542776278 hasConcept C136525101 @default.
- W1542776278 hasConcept C142724271 @default.
- W1542776278 hasConcept C159985019 @default.
- W1542776278 hasConcept C160671074 @default.
- W1542776278 hasConcept C162117346 @default.
- W1542776278 hasConcept C171250308 @default.
- W1542776278 hasConcept C192562407 @default.
- W1542776278 hasConcept C204223013 @default.
- W1542776278 hasConcept C204787440 @default.
- W1542776278 hasConcept C2776921476 @default.
- W1542776278 hasConcept C2779227376 @default.
- W1542776278 hasConcept C2780566776 @default.
- W1542776278 hasConcept C49040817 @default.
- W1542776278 hasConcept C57410435 @default.
- W1542776278 hasConcept C71924100 @default.
- W1542776278 hasConceptScore W1542776278C100460472 @default.
- W1542776278 hasConceptScore W1542776278C105487726 @default.
- W1542776278 hasConceptScore W1542776278C136525101 @default.
- W1542776278 hasConceptScore W1542776278C142724271 @default.
- W1542776278 hasConceptScore W1542776278C159985019 @default.
- W1542776278 hasConceptScore W1542776278C160671074 @default.
- W1542776278 hasConceptScore W1542776278C162117346 @default.
- W1542776278 hasConceptScore W1542776278C171250308 @default.
- W1542776278 hasConceptScore W1542776278C192562407 @default.
- W1542776278 hasConceptScore W1542776278C204223013 @default.
- W1542776278 hasConceptScore W1542776278C204787440 @default.
- W1542776278 hasConceptScore W1542776278C2776921476 @default.
- W1542776278 hasConceptScore W1542776278C2779227376 @default.
- W1542776278 hasConceptScore W1542776278C2780566776 @default.
- W1542776278 hasConceptScore W1542776278C49040817 @default.
- W1542776278 hasConceptScore W1542776278C57410435 @default.
- W1542776278 hasConceptScore W1542776278C71924100 @default.
- W1542776278 hasLocation W15427762781 @default.
- W1542776278 hasOpenAccess W1542776278 @default.
- W1542776278 hasPrimaryLocation W15427762781 @default.
- W1542776278 hasRelatedWork W1853720764 @default.
- W1542776278 hasRelatedWork W1998424548 @default.
- W1542776278 hasRelatedWork W2007118471 @default.
- W1542776278 hasRelatedWork W2015559780 @default.
- W1542776278 hasRelatedWork W2020370702 @default.
- W1542776278 hasRelatedWork W2033504474 @default.
- W1542776278 hasRelatedWork W2037310556 @default.
- W1542776278 hasRelatedWork W2064378498 @default.
- W1542776278 hasRelatedWork W2082605358 @default.
- W1542776278 hasRelatedWork W2086400089 @default.
- W1542776278 hasRelatedWork W2122225988 @default.
- W1542776278 hasRelatedWork W2131849757 @default.
- W1542776278 hasRelatedWork W2137657621 @default.
- W1542776278 hasRelatedWork W2762452022 @default.
- W1542776278 hasRelatedWork W2778325982 @default.
- W1542776278 hasRelatedWork W2836803001 @default.
- W1542776278 hasRelatedWork W2843030393 @default.
- W1542776278 hasRelatedWork W2871738250 @default.
- W1542776278 hasRelatedWork W2876881947 @default.
- W1542776278 hasRelatedWork W2929300129 @default.
- W1542776278 isParatext "false" @default.
- W1542776278 isRetracted "false" @default.
- W1542776278 magId "1542776278" @default.
- W1542776278 workType "article" @default.