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- W1542851409 startingPage "432" @default.
- W1542851409 abstract "CMP characteristics such as material removal rate and edge effect were measured and investigated in accordance with pad grooving effect, groove width, depth and pitch GSQ (Groove Stiffness Quitient) and GFQ (Groove Flow Quitient) were proposed to estimate pad grooving characteristics GSQ is defined as groove depth(D) divided by pad thickness(T) and GFQ is defined as groove width(W) divided by groove pitch(P) As GFQ value increased, material removal rate increased some point but gradually saturated It seems that material removal rate is not affected by each parameter respectively but by interaction of these parameters such as groove dimensions In addition, an increase in GFQ and GSQ cause edge effect to be improved. Because, pad stiffnessdecreases as GSQ and GFQ increase In conclusion, groove influences relative pad stiffness although ariginal mechanical properties of pad are unchanged by grooving Also, it affects the flow of slurry that has an effect on the lubrication regime and and polishing results The change of groove dimensions has influence on pad stiffness and slurry flow, so that polishing results such as removal rate and edge effect become changed." @default.
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- W1542851409 date "2005-03-01" @default.
- W1542851409 modified "2023-10-16" @default.
- W1542851409 title "The Effects of Groove Dimensions of Pad on CMP Characteristics" @default.
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- W1542851409 doi "https://doi.org/10.3795/ksme-a.2005.29.3.432" @default.
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