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- W1543006211 abstract "High k dielectric metal oxide films have attracted much attention as promising candidates for the forthcoming gate dielectric materials of metal oxide field effect transistors, in place of SiO2 films 1 . Silicon oxide and silicon nitride dielectrics that are commonly used in conventional metal insulator semiconductor structures. These materials provide good voltage linearity and lower temperature coefficients but lack due to low dielectric constants (k~3.8 for silicon oxide and ~8 for silicon nitride). To increase the capacitance and while reducing the tunneling current, various kinds of high dielectric materials have investigated as possible alternatives to SiO2 2 . Among these materials, HfO2 is one of the most promising candidates because of its high stability against thermal treatments 3 . HfO2 has been in the forefront of dielectric applications in recent years employed in Si based technology. However, recently there have been reports by Afanasev et al 4 and others on the application of HfO2 stacks on SiC for low leakage current applications." @default.
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- W1543006211 date "2006-03-10" @default.
- W1543006211 modified "2023-09-27" @default.
- W1543006211 title "Low Leakage Current Transport and High Breakdown Strength of HfO/sub 2//SiC MIS Device Structures" @default.
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- W1543006211 doi "https://doi.org/10.1109/isdrs.2005.1596072" @default.
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