Matches in SemOpenAlex for { <https://semopenalex.org/work/W154312045> ?p ?o ?g. }
Showing items 1 to 81 of
81
with 100 items per page.
- W154312045 abstract "This report reviews the major methods and techniques we use in generating basic atomic and plasma properties relevant to extreme ultraviolet (EUV) lithography applications. The basis of the work is the calculation of the atomic energy levels, transitions probabilities, and other atomic data by various methods, which differ in accuracy, completeness, and complication. Later on, we calculate the populations of atomic levels and ion states in plasmas by means of the collision-radiation equilibrium (CRE) model. The results of the CRE model are used as input to the thermodynamic functions, such as pressure and temperature from the internal energy and density (equation of state), electric resistance, thermal conduction, and other plasma properties. In addition, optical coefficients, such as emission and absorption coefficients, are generated to resolve a radiation transport equation (RTE). The capabilities of our approach are demonstrated by generating the required atomic and plasma properties for tin ions and plasma within the EUV region near 13.5 nm." @default.
- W154312045 created "2016-06-24" @default.
- W154312045 creator A5029097407 @default.
- W154312045 creator A5054039712 @default.
- W154312045 creator A5082577670 @default.
- W154312045 date "2005-08-26" @default.
- W154312045 modified "2023-09-26" @default.
- W154312045 title "Calculation of tin atomic data and plasma properties." @default.
- W154312045 cites W1989558200 @default.
- W154312045 cites W2036072776 @default.
- W154312045 cites W2038443881 @default.
- W154312045 cites W2106726776 @default.
- W154312045 cites W2158539547 @default.
- W154312045 cites W2414796159 @default.
- W154312045 doi "https://doi.org/10.2172/881578" @default.
- W154312045 hasPublicationYear "2005" @default.
- W154312045 type Work @default.
- W154312045 sameAs 154312045 @default.
- W154312045 citedByCount "6" @default.
- W154312045 countsByYear W1543120452017 @default.
- W154312045 countsByYear W1543120452021 @default.
- W154312045 crossrefType "report" @default.
- W154312045 hasAuthorship W154312045A5029097407 @default.
- W154312045 hasAuthorship W154312045A5054039712 @default.
- W154312045 hasAuthorship W154312045A5082577670 @default.
- W154312045 hasBestOaLocation W1543120453 @default.
- W154312045 hasConcept C120665830 @default.
- W154312045 hasConcept C121332964 @default.
- W154312045 hasConcept C145148216 @default.
- W154312045 hasConcept C146024833 @default.
- W154312045 hasConcept C153385146 @default.
- W154312045 hasConcept C162996421 @default.
- W154312045 hasConcept C171250308 @default.
- W154312045 hasConcept C178790620 @default.
- W154312045 hasConcept C184779094 @default.
- W154312045 hasConcept C185592680 @default.
- W154312045 hasConcept C18762648 @default.
- W154312045 hasConcept C192562407 @default.
- W154312045 hasConcept C30475298 @default.
- W154312045 hasConcept C520434653 @default.
- W154312045 hasConcept C525849907 @default.
- W154312045 hasConcept C62520636 @default.
- W154312045 hasConcept C82706917 @default.
- W154312045 hasConcept C97355855 @default.
- W154312045 hasConceptScore W154312045C120665830 @default.
- W154312045 hasConceptScore W154312045C121332964 @default.
- W154312045 hasConceptScore W154312045C145148216 @default.
- W154312045 hasConceptScore W154312045C146024833 @default.
- W154312045 hasConceptScore W154312045C153385146 @default.
- W154312045 hasConceptScore W154312045C162996421 @default.
- W154312045 hasConceptScore W154312045C171250308 @default.
- W154312045 hasConceptScore W154312045C178790620 @default.
- W154312045 hasConceptScore W154312045C184779094 @default.
- W154312045 hasConceptScore W154312045C185592680 @default.
- W154312045 hasConceptScore W154312045C18762648 @default.
- W154312045 hasConceptScore W154312045C192562407 @default.
- W154312045 hasConceptScore W154312045C30475298 @default.
- W154312045 hasConceptScore W154312045C520434653 @default.
- W154312045 hasConceptScore W154312045C525849907 @default.
- W154312045 hasConceptScore W154312045C62520636 @default.
- W154312045 hasConceptScore W154312045C82706917 @default.
- W154312045 hasConceptScore W154312045C97355855 @default.
- W154312045 hasLocation W1543120451 @default.
- W154312045 hasLocation W1543120452 @default.
- W154312045 hasLocation W1543120453 @default.
- W154312045 hasOpenAccess W154312045 @default.
- W154312045 hasPrimaryLocation W1543120451 @default.
- W154312045 hasRelatedWork W1985524521 @default.
- W154312045 hasRelatedWork W1998739782 @default.
- W154312045 hasRelatedWork W2009465010 @default.
- W154312045 hasRelatedWork W2043132369 @default.
- W154312045 hasRelatedWork W2090683817 @default.
- W154312045 hasRelatedWork W2327673780 @default.
- W154312045 hasRelatedWork W2762064598 @default.
- W154312045 hasRelatedWork W2788885654 @default.
- W154312045 hasRelatedWork W3198801845 @default.
- W154312045 hasRelatedWork W4297607934 @default.
- W154312045 isParatext "false" @default.
- W154312045 isRetracted "false" @default.
- W154312045 magId "154312045" @default.
- W154312045 workType "report" @default.