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- W1543136411 abstract "The silicide layer used as a diffusion barrier in microelectronics is typically required to be below 50 nm-thick and, the same time, the silicides also need to have low contact resistance without agglomeration at high processing temperatures. We fabricated Si(100)/15 nm-Ni/15 nm-Co samples with a thermal evaporator, and annealed the samples for 40 seconds at temperatures ranging from <TEX>$700^{circ}C$</TEX> to <TEX>$1100^{circ}C$</TEX> using rapid thermal annealing. We investigated microstructural and compositional changes during annealing using transmission electron microscopy and auger electron spectroscopy. Sheet resistance of the annealed sample stack was measured with a four point probe. The sheet resistance measurements for our proposed Co/Ni composite silicide was below 8 <TEX>$Omega$</TEX>/sq. even after annealing <TEX>$1100^{circ}C$</TEX>, while conventional nickel-monosilicide showed abrupt phase transformation at <TEX>$700^{circ}C$</TEX>. Microstructure and auger depth profiling showed that the silicides in our sample consisted of intermixed phases of <TEX>$CoNiSi_{x}$</TEX> and NiSi. It was noticed that NiSi grew rapidly at the silicon interface with increasing annealing temperature without transforming into <TEX>$NiSi_2$</TEX>. Our results imply that Co/Ni composite silicide should have excellent high temperature stability even in post-silicidation processes." @default.
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- W1543136411 date "2004-06-01" @default.
- W1543136411 modified "2023-10-18" @default.
- W1543136411 title "Sheet Resistance and Microstructure Evolution of Cobalt/Nickel Silicides with Annealing Temperature" @default.
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- W1543136411 doi "https://doi.org/10.3740/mrsk.2004.14.6.389" @default.
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