Matches in SemOpenAlex for { <https://semopenalex.org/work/W1543423204> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W1543423204 endingPage "410" @default.
- W1543423204 startingPage "407" @default.
- W1543423204 abstract "Si wafers subject to short-time (4-12 min.), low-temperature atomic hydrogen cleaning in an electron cyclotron resonance (ESR) plasma system have been annealed subsequently in the temperature range 300-750 °C for 20 mins. While only a small broad peak is seen immediately after hydrogenation, several pronounced and distinct majority carrier trap levels show up in deep level transient spectroscopy (DLTS) measurements of subsequently fabricated Schottky diodes on samples annealed at 450 °C and above. These appear to be related to thermal donors, with their formation rate greatly enhanced by the pre-anneal atomic hydrogenation. The concentrations of these levels drop substantially after the 750 °C anneal." @default.
- W1543423204 created "2016-06-24" @default.
- W1543423204 creator A5057651898 @default.
- W1543423204 creator A5064245670 @default.
- W1543423204 date "1994-01-01" @default.
- W1543423204 modified "2023-09-23" @default.
- W1543423204 title "Generation of Deep Levels in Silicon under Post-Hydrogen-Plasma Thermal Anneal" @default.
- W1543423204 hasPublicationYear "1994" @default.
- W1543423204 type Work @default.
- W1543423204 sameAs 1543423204 @default.
- W1543423204 citedByCount "0" @default.
- W1543423204 crossrefType "proceedings-article" @default.
- W1543423204 hasAuthorship W1543423204A5057651898 @default.
- W1543423204 hasAuthorship W1543423204A5064245670 @default.
- W1543423204 hasConcept C113196181 @default.
- W1543423204 hasConcept C121332964 @default.
- W1543423204 hasConcept C153294291 @default.
- W1543423204 hasConcept C160671074 @default.
- W1543423204 hasConcept C175361016 @default.
- W1543423204 hasConcept C178790620 @default.
- W1543423204 hasConcept C185592680 @default.
- W1543423204 hasConcept C191897082 @default.
- W1543423204 hasConcept C192562407 @default.
- W1543423204 hasConcept C205200001 @default.
- W1543423204 hasConcept C2777855556 @default.
- W1543423204 hasConcept C2780080961 @default.
- W1543423204 hasConcept C39353612 @default.
- W1543423204 hasConcept C43617362 @default.
- W1543423204 hasConcept C49040817 @default.
- W1543423204 hasConcept C512968161 @default.
- W1543423204 hasConcept C544956773 @default.
- W1543423204 hasConcept C62520636 @default.
- W1543423204 hasConcept C78434282 @default.
- W1543423204 hasConcept C82706917 @default.
- W1543423204 hasConceptScore W1543423204C113196181 @default.
- W1543423204 hasConceptScore W1543423204C121332964 @default.
- W1543423204 hasConceptScore W1543423204C153294291 @default.
- W1543423204 hasConceptScore W1543423204C160671074 @default.
- W1543423204 hasConceptScore W1543423204C175361016 @default.
- W1543423204 hasConceptScore W1543423204C178790620 @default.
- W1543423204 hasConceptScore W1543423204C185592680 @default.
- W1543423204 hasConceptScore W1543423204C191897082 @default.
- W1543423204 hasConceptScore W1543423204C192562407 @default.
- W1543423204 hasConceptScore W1543423204C205200001 @default.
- W1543423204 hasConceptScore W1543423204C2777855556 @default.
- W1543423204 hasConceptScore W1543423204C2780080961 @default.
- W1543423204 hasConceptScore W1543423204C39353612 @default.
- W1543423204 hasConceptScore W1543423204C43617362 @default.
- W1543423204 hasConceptScore W1543423204C49040817 @default.
- W1543423204 hasConceptScore W1543423204C512968161 @default.
- W1543423204 hasConceptScore W1543423204C544956773 @default.
- W1543423204 hasConceptScore W1543423204C62520636 @default.
- W1543423204 hasConceptScore W1543423204C78434282 @default.
- W1543423204 hasConceptScore W1543423204C82706917 @default.
- W1543423204 hasLocation W15434232041 @default.
- W1543423204 hasOpenAccess W1543423204 @default.
- W1543423204 hasPrimaryLocation W15434232041 @default.
- W1543423204 hasRelatedWork W1614059887 @default.
- W1543423204 hasRelatedWork W1667588925 @default.
- W1543423204 hasRelatedWork W1788427337 @default.
- W1543423204 hasRelatedWork W1964618615 @default.
- W1543423204 hasRelatedWork W1973023105 @default.
- W1543423204 hasRelatedWork W1983121707 @default.
- W1543423204 hasRelatedWork W1990881187 @default.
- W1543423204 hasRelatedWork W1992981272 @default.
- W1543423204 hasRelatedWork W1998838500 @default.
- W1543423204 hasRelatedWork W1999720787 @default.
- W1543423204 hasRelatedWork W2001100088 @default.
- W1543423204 hasRelatedWork W2017186924 @default.
- W1543423204 hasRelatedWork W2061158544 @default.
- W1543423204 hasRelatedWork W2072626288 @default.
- W1543423204 hasRelatedWork W2081336291 @default.
- W1543423204 hasRelatedWork W2095091521 @default.
- W1543423204 hasRelatedWork W2122760753 @default.
- W1543423204 hasRelatedWork W2333932250 @default.
- W1543423204 hasRelatedWork W2562594545 @default.
- W1543423204 hasRelatedWork W2740013726 @default.
- W1543423204 isParatext "false" @default.
- W1543423204 isRetracted "false" @default.
- W1543423204 magId "1543423204" @default.
- W1543423204 workType "article" @default.