Matches in SemOpenAlex for { <https://semopenalex.org/work/W1543488641> ?p ?o ?g. }
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- W1543488641 endingPage "55" @default.
- W1543488641 startingPage "52" @default.
- W1543488641 abstract "A central composite design response surface study was used to determine the etching characteristics of GaAs/AlGaAs in high-density inductively coupled BCl3/Cl2-based plasmas as a function of process parameters including inductive power, substrate bias, and pressure. Equietch rates were obtained for GaAs and AlxGa1−xAs in the entire parameter space investigated and ranged from approximately 0.3 to 1.0 μm/min. The etch rate of GaAs/AlGaAs grew with an increase in all three parameters. Variations in inductive power had the maximum effect on the etch rate while the bias affected the etch rate the least. In contrast, bias played a significant role in the etch rate of photoresist indicating different mechanisms for resist etching. An ion energy threshold was observed for resist etching which was found to increase with decreasing inductive power. Anisotropic GaAs/AlGaAs etch profiles were obtained over a wide range of parameters including very low substrate bias. Extremely smooth etched surfaces were observed for most etch conditions." @default.
- W1543488641 created "2016-06-24" @default.
- W1543488641 creator A5003259253 @default.
- W1543488641 creator A5007759448 @default.
- W1543488641 creator A5025059896 @default.
- W1543488641 creator A5046488681 @default.
- W1543488641 creator A5050993786 @default.
- W1543488641 creator A5059402685 @default.
- W1543488641 creator A5084042557 @default.
- W1543488641 date "1999-01-01" @default.
- W1543488641 modified "2023-10-17" @default.
- W1543488641 title "Response surface study of inductively coupled plasma etching of GaAs/AlGaAs in BCl3/Cl2" @default.
- W1543488641 cites W1987225007 @default.
- W1543488641 cites W1991849600 @default.
- W1543488641 cites W2008694062 @default.
- W1543488641 cites W2013131381 @default.
- W1543488641 cites W2024373100 @default.
- W1543488641 cites W2045327586 @default.
- W1543488641 cites W2048271889 @default.
- W1543488641 cites W2064397913 @default.
- W1543488641 cites W2089320254 @default.
- W1543488641 doi "https://doi.org/10.1116/1.581549" @default.
- W1543488641 hasPublicationYear "1999" @default.
- W1543488641 type Work @default.
- W1543488641 sameAs 1543488641 @default.
- W1543488641 citedByCount "19" @default.
- W1543488641 countsByYear W15434886412013 @default.
- W1543488641 countsByYear W15434886412016 @default.
- W1543488641 countsByYear W15434886412018 @default.
- W1543488641 countsByYear W15434886412022 @default.
- W1543488641 crossrefType "journal-article" @default.
- W1543488641 hasAuthorship W1543488641A5003259253 @default.
- W1543488641 hasAuthorship W1543488641A5007759448 @default.
- W1543488641 hasAuthorship W1543488641A5025059896 @default.
- W1543488641 hasAuthorship W1543488641A5046488681 @default.
- W1543488641 hasAuthorship W1543488641A5050993786 @default.
- W1543488641 hasAuthorship W1543488641A5059402685 @default.
- W1543488641 hasAuthorship W1543488641A5084042557 @default.
- W1543488641 hasConcept C100460472 @default.
- W1543488641 hasConcept C107187091 @default.
- W1543488641 hasConcept C111368507 @default.
- W1543488641 hasConcept C113196181 @default.
- W1543488641 hasConcept C121332964 @default.
- W1543488641 hasConcept C127313418 @default.
- W1543488641 hasConcept C134406635 @default.
- W1543488641 hasConcept C171250308 @default.
- W1543488641 hasConcept C185592680 @default.
- W1543488641 hasConcept C192562407 @default.
- W1543488641 hasConcept C2777289219 @default.
- W1543488641 hasConcept C2779227376 @default.
- W1543488641 hasConcept C43617362 @default.
- W1543488641 hasConcept C49040817 @default.
- W1543488641 hasConcept C510052550 @default.
- W1543488641 hasConcept C53524968 @default.
- W1543488641 hasConcept C62520636 @default.
- W1543488641 hasConcept C81626474 @default.
- W1543488641 hasConcept C82706917 @default.
- W1543488641 hasConcept C95974651 @default.
- W1543488641 hasConceptScore W1543488641C100460472 @default.
- W1543488641 hasConceptScore W1543488641C107187091 @default.
- W1543488641 hasConceptScore W1543488641C111368507 @default.
- W1543488641 hasConceptScore W1543488641C113196181 @default.
- W1543488641 hasConceptScore W1543488641C121332964 @default.
- W1543488641 hasConceptScore W1543488641C127313418 @default.
- W1543488641 hasConceptScore W1543488641C134406635 @default.
- W1543488641 hasConceptScore W1543488641C171250308 @default.
- W1543488641 hasConceptScore W1543488641C185592680 @default.
- W1543488641 hasConceptScore W1543488641C192562407 @default.
- W1543488641 hasConceptScore W1543488641C2777289219 @default.
- W1543488641 hasConceptScore W1543488641C2779227376 @default.
- W1543488641 hasConceptScore W1543488641C43617362 @default.
- W1543488641 hasConceptScore W1543488641C49040817 @default.
- W1543488641 hasConceptScore W1543488641C510052550 @default.
- W1543488641 hasConceptScore W1543488641C53524968 @default.
- W1543488641 hasConceptScore W1543488641C62520636 @default.
- W1543488641 hasConceptScore W1543488641C81626474 @default.
- W1543488641 hasConceptScore W1543488641C82706917 @default.
- W1543488641 hasConceptScore W1543488641C95974651 @default.
- W1543488641 hasIssue "1" @default.
- W1543488641 hasLocation W15434886411 @default.
- W1543488641 hasOpenAccess W1543488641 @default.
- W1543488641 hasPrimaryLocation W15434886411 @default.
- W1543488641 hasRelatedWork W1543488641 @default.
- W1543488641 hasRelatedWork W1968216285 @default.
- W1543488641 hasRelatedWork W1977421911 @default.
- W1543488641 hasRelatedWork W2053356762 @default.
- W1543488641 hasRelatedWork W2065108417 @default.
- W1543488641 hasRelatedWork W2089265715 @default.
- W1543488641 hasRelatedWork W2113489028 @default.
- W1543488641 hasRelatedWork W2136502888 @default.
- W1543488641 hasRelatedWork W2964303512 @default.
- W1543488641 hasRelatedWork W4298206121 @default.
- W1543488641 hasVolume "17" @default.
- W1543488641 isParatext "false" @default.
- W1543488641 isRetracted "false" @default.
- W1543488641 magId "1543488641" @default.
- W1543488641 workType "article" @default.