Matches in SemOpenAlex for { <https://semopenalex.org/work/W1544093650> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W1544093650 abstract "Ultra-thin silicon nitride films (with equivalent oxide thicknesses /spl les/4 nm) have been successfully deposited directly on silicon substrates at room temperature using jet vapor deposition technique. These ultra-thin silicon nitride films exhibit excellent C-V and I-V characteristics, high electrical breakdown strength, low leakage current, and low densities of bulk and interface traps. These properties make JVD silicon nitride a very attractive candidate to extend the scaling limit of the gate dielectric below 4 nm of equivalent oxide thickness." @default.
- W1544093650 created "2016-06-24" @default.
- W1544093650 creator A5005214741 @default.
- W1544093650 creator A5049284015 @default.
- W1544093650 creator A5049389209 @default.
- W1544093650 creator A5065336122 @default.
- W1544093650 creator A5073258837 @default.
- W1544093650 creator A5090747128 @default.
- W1544093650 date "2002-11-19" @default.
- W1544093650 modified "2023-09-27" @default.
- W1544093650 title "Ultra-thin silicon nitride films on Si by jet vapor deposition" @default.
- W1544093650 cites W1848440189 @default.
- W1544093650 cites W2110832412 @default.
- W1544093650 doi "https://doi.org/10.1109/vtsa.1995.524632" @default.
- W1544093650 hasPublicationYear "2002" @default.
- W1544093650 type Work @default.
- W1544093650 sameAs 1544093650 @default.
- W1544093650 citedByCount "3" @default.
- W1544093650 crossrefType "proceedings-article" @default.
- W1544093650 hasAuthorship W1544093650A5005214741 @default.
- W1544093650 hasAuthorship W1544093650A5049284015 @default.
- W1544093650 hasAuthorship W1544093650A5049389209 @default.
- W1544093650 hasAuthorship W1544093650A5065336122 @default.
- W1544093650 hasAuthorship W1544093650A5073258837 @default.
- W1544093650 hasAuthorship W1544093650A5090747128 @default.
- W1544093650 hasConcept C133386390 @default.
- W1544093650 hasConcept C171250308 @default.
- W1544093650 hasConcept C19067145 @default.
- W1544093650 hasConcept C191897082 @default.
- W1544093650 hasConcept C192562407 @default.
- W1544093650 hasConcept C194760766 @default.
- W1544093650 hasConcept C195114451 @default.
- W1544093650 hasConcept C2777431650 @default.
- W1544093650 hasConcept C2779105228 @default.
- W1544093650 hasConcept C2779227376 @default.
- W1544093650 hasConcept C2779851234 @default.
- W1544093650 hasConcept C49040817 @default.
- W1544093650 hasConcept C51576277 @default.
- W1544093650 hasConcept C544956773 @default.
- W1544093650 hasConcept C57410435 @default.
- W1544093650 hasConcept C69544855 @default.
- W1544093650 hasConceptScore W1544093650C133386390 @default.
- W1544093650 hasConceptScore W1544093650C171250308 @default.
- W1544093650 hasConceptScore W1544093650C19067145 @default.
- W1544093650 hasConceptScore W1544093650C191897082 @default.
- W1544093650 hasConceptScore W1544093650C192562407 @default.
- W1544093650 hasConceptScore W1544093650C194760766 @default.
- W1544093650 hasConceptScore W1544093650C195114451 @default.
- W1544093650 hasConceptScore W1544093650C2777431650 @default.
- W1544093650 hasConceptScore W1544093650C2779105228 @default.
- W1544093650 hasConceptScore W1544093650C2779227376 @default.
- W1544093650 hasConceptScore W1544093650C2779851234 @default.
- W1544093650 hasConceptScore W1544093650C49040817 @default.
- W1544093650 hasConceptScore W1544093650C51576277 @default.
- W1544093650 hasConceptScore W1544093650C544956773 @default.
- W1544093650 hasConceptScore W1544093650C57410435 @default.
- W1544093650 hasConceptScore W1544093650C69544855 @default.
- W1544093650 hasLocation W15440936501 @default.
- W1544093650 hasOpenAccess W1544093650 @default.
- W1544093650 hasPrimaryLocation W15440936501 @default.
- W1544093650 hasRelatedWork W1564788367 @default.
- W1544093650 hasRelatedWork W1573335264 @default.
- W1544093650 hasRelatedWork W1626016938 @default.
- W1544093650 hasRelatedWork W1978492049 @default.
- W1544093650 hasRelatedWork W1994892254 @default.
- W1544093650 hasRelatedWork W2031852880 @default.
- W1544093650 hasRelatedWork W2043194751 @default.
- W1544093650 hasRelatedWork W2044601023 @default.
- W1544093650 hasRelatedWork W2054687356 @default.
- W1544093650 hasRelatedWork W2058184765 @default.
- W1544093650 hasRelatedWork W2060038069 @default.
- W1544093650 hasRelatedWork W2088743312 @default.
- W1544093650 hasRelatedWork W2089159604 @default.
- W1544093650 hasRelatedWork W2113231445 @default.
- W1544093650 hasRelatedWork W2123138901 @default.
- W1544093650 hasRelatedWork W2128383799 @default.
- W1544093650 hasRelatedWork W2131861978 @default.
- W1544093650 hasRelatedWork W2139768538 @default.
- W1544093650 hasRelatedWork W2338178895 @default.
- W1544093650 hasRelatedWork W2543553148 @default.
- W1544093650 isParatext "false" @default.
- W1544093650 isRetracted "false" @default.
- W1544093650 magId "1544093650" @default.
- W1544093650 workType "article" @default.