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- W1544207970 abstract "Summary form only given. Notch formation and aspect ratio dependent etching (ARDE) are becoming serious problems in the over-etching of line and space structures in poly-Si on SiO/sub 2/. Experimental results for Cl/sub 2/ plasma etching of poly-Si and C/sub 2/H/sub 2/F/sub 4/ in SiO/sub 2/ in a helicon etch tool are presented which are modeled by differential charging and ion assisted etching. It is shown that modulation of the 13.56 MHz RF source can eliminate both of these effects in the absence of RF wafer bias but fails in the presence of CW wafer bias. It is also shown that simultaneous source and wafer modulation eliminates both notch formation and ARDE. On/off modulation with a 50% duty cycle and period ranging from 0 to 200 /spl mu/s are investigated and optimum notch and ARDE reduction are found at 40 to 200 /spl mu/s." @default.
- W1544207970 created "2016-06-24" @default.
- W1544207970 creator A5041649147 @default.
- W1544207970 creator A5082123332 @default.
- W1544207970 date "2003-01-22" @default.
- W1544207970 modified "2023-09-26" @default.
- W1544207970 title "Elimination of notching and ARDE by simultaneous modulation of source and wafer RF" @default.
- W1544207970 doi "https://doi.org/10.1109/plasma.1999.829348" @default.
- W1544207970 hasPublicationYear "2003" @default.
- W1544207970 type Work @default.
- W1544207970 sameAs 1544207970 @default.
- W1544207970 citedByCount "1" @default.
- W1544207970 countsByYear W15442079702021 @default.
- W1544207970 crossrefType "proceedings-article" @default.
- W1544207970 hasAuthorship W1544207970A5041649147 @default.
- W1544207970 hasAuthorship W1544207970A5082123332 @default.
- W1544207970 hasConcept C100460472 @default.
- W1544207970 hasConcept C107187091 @default.
- W1544207970 hasConcept C113196181 @default.
- W1544207970 hasConcept C119599485 @default.
- W1544207970 hasConcept C121332964 @default.
- W1544207970 hasConcept C123079801 @default.
- W1544207970 hasConcept C127413603 @default.
- W1544207970 hasConcept C130472188 @default.
- W1544207970 hasConcept C160671074 @default.
- W1544207970 hasConcept C165801399 @default.
- W1544207970 hasConcept C169961218 @default.
- W1544207970 hasConcept C171250308 @default.
- W1544207970 hasConcept C185592680 @default.
- W1544207970 hasConcept C191897082 @default.
- W1544207970 hasConcept C192562407 @default.
- W1544207970 hasConcept C199822604 @default.
- W1544207970 hasConcept C24890656 @default.
- W1544207970 hasConcept C2779123320 @default.
- W1544207970 hasConcept C2779227376 @default.
- W1544207970 hasConcept C43617362 @default.
- W1544207970 hasConcept C49040817 @default.
- W1544207970 hasConcept C62520636 @default.
- W1544207970 hasConcept C82706917 @default.
- W1544207970 hasConceptScore W1544207970C100460472 @default.
- W1544207970 hasConceptScore W1544207970C107187091 @default.
- W1544207970 hasConceptScore W1544207970C113196181 @default.
- W1544207970 hasConceptScore W1544207970C119599485 @default.
- W1544207970 hasConceptScore W1544207970C121332964 @default.
- W1544207970 hasConceptScore W1544207970C123079801 @default.
- W1544207970 hasConceptScore W1544207970C127413603 @default.
- W1544207970 hasConceptScore W1544207970C130472188 @default.
- W1544207970 hasConceptScore W1544207970C160671074 @default.
- W1544207970 hasConceptScore W1544207970C165801399 @default.
- W1544207970 hasConceptScore W1544207970C169961218 @default.
- W1544207970 hasConceptScore W1544207970C171250308 @default.
- W1544207970 hasConceptScore W1544207970C185592680 @default.
- W1544207970 hasConceptScore W1544207970C191897082 @default.
- W1544207970 hasConceptScore W1544207970C192562407 @default.
- W1544207970 hasConceptScore W1544207970C199822604 @default.
- W1544207970 hasConceptScore W1544207970C24890656 @default.
- W1544207970 hasConceptScore W1544207970C2779123320 @default.
- W1544207970 hasConceptScore W1544207970C2779227376 @default.
- W1544207970 hasConceptScore W1544207970C43617362 @default.
- W1544207970 hasConceptScore W1544207970C49040817 @default.
- W1544207970 hasConceptScore W1544207970C62520636 @default.
- W1544207970 hasConceptScore W1544207970C82706917 @default.
- W1544207970 hasLocation W15442079701 @default.
- W1544207970 hasOpenAccess W1544207970 @default.
- W1544207970 hasPrimaryLocation W15442079701 @default.
- W1544207970 hasRelatedWork W1562685868 @default.
- W1544207970 hasRelatedWork W1565019419 @default.
- W1544207970 hasRelatedWork W1653160618 @default.
- W1544207970 hasRelatedWork W1895521191 @default.
- W1544207970 hasRelatedWork W1915714187 @default.
- W1544207970 hasRelatedWork W1937296268 @default.
- W1544207970 hasRelatedWork W1986311441 @default.
- W1544207970 hasRelatedWork W2100539879 @default.
- W1544207970 hasRelatedWork W2111921124 @default.
- W1544207970 hasRelatedWork W2113137155 @default.
- W1544207970 hasRelatedWork W2116150321 @default.
- W1544207970 hasRelatedWork W2118694165 @default.
- W1544207970 hasRelatedWork W2123845175 @default.
- W1544207970 hasRelatedWork W2126128201 @default.
- W1544207970 hasRelatedWork W2150775940 @default.
- W1544207970 hasRelatedWork W2152093975 @default.
- W1544207970 hasRelatedWork W2158093478 @default.
- W1544207970 hasRelatedWork W2160053415 @default.
- W1544207970 hasRelatedWork W2167607168 @default.
- W1544207970 hasRelatedWork W2534856878 @default.
- W1544207970 isParatext "false" @default.
- W1544207970 isRetracted "false" @default.
- W1544207970 magId "1544207970" @default.
- W1544207970 workType "article" @default.